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US 8,997,259 B2Granted
Method and apparatus of tuning a scanning probe microscope
AssigneeBruker Nano, Inc.
InventorsChanmin Su, Paul Silva, Lin Huang, Bede Pittenger, Shuiqing Hu
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Abstract
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
Claims20
A method of operating a scanning probe microscope (SPM) comprising:
- tuning the SPM to determine an operating frequency of a drive of the SPM without detecting an amplitude response of an oscillating probe over a range of frequencies.
A scanning probe microscope (SPM) comprising:
- a probe;
- a drive to cause the probe to oscillate;
- a detector that detects deflection of the probe during operation of the SPM;
- wherein the SPM determines an operating frequency of the drive without detecting an amplitude response of the oscillating probe over a range of frequencies.
1 more element
Dependencies are inferred from the claim text.