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US 8,992,784 B2Granted
Method for making a reinforced silicon micromechanical part
AssigneeMontres Breguet S.A.
InventorNakis Karapatis
Life of this patent
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Abstract
A method of fabricating a reinforced silicon micromechanical part includes: micro-machining the part, or a batch of parts in a silicon wafer; forming a silicon dioxide layer over the entire surface of the part, in one or plural operations, so as to obtain a thickness of silicon dioxide that is at least five times greater than the thickness of native silicon dioxide; and removing the silicon dioxide layer by etching.
Claims4
A method of fabricating a reinforced silicon micromechanical part configured to be integrated in a timepiece mechanism, the method including, in order:
- micro-machining a timepiece-mechanism part, or a batch of timepiece mechanism parts in a silicon wafer;
- forming a silicon dioxide layer over the entire surface of the part, in one or plural operations, so as to obtain a thickness of silicon dioxide that is at least five times greater than the thickness of native silicon dioxide;
- and
- removing the silicon dioxide layer by etching, which includes removing the silicon dioxide layer except for veins of silicon dioxide that fill cracks in the timepiece-mechanism part.
1 more element
Dependencies are inferred from the claim text.