Fabricating a small-scale radiation detector
AssigneeInternational Business Machines Corporation
InventorsMichael S. Gordon, Christopher V. Jahnes, Eric A. Joseph, Hiroyuki Miyazoe, Kenneth P. Rodbell, Arun Sharma, Sri M. Sri-Jayantha
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Abstract
A method for a constructing radiation detector includes fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, forming a cavity within the multi-layer structure, filling the cavity with a gas that ionizes in response to nuclear radiation, and sealing the gas within the cavity.
Claims25
A method for constructing a radiation detector, the method comprising:
- fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, wherein the multi-layer structure comprises:
- a first metal layer deposited upon the wafer;
- a first sacrificial layer deposited upon the first metal layer;
- a second metal layer deposited upon the first sacrificial layer;
- a second sacrificial layer deposited upon the second metal layer;
- and
- a third metal layer deposited upon the second sacrificial layer;
- forming a cavity within the multi-layer structure;
- filling the cavity with a gas that ionizes in response to nuclear radiation;
- and
- sealing the gas within the cavity.
A method for fabricating a radiation detector, the method comprising:
- depositing a first metal layer upon a wafer;
- depositing a first sacrificial layer upon the first metal layer;
- etching a portion of the first sacrificial layer down to the first metal layer;
- backfilling the portion of the first sacrificial layer with a first insulating layer;
- depositing a second metal layer upon the first sacrificial layer and the first insulating layer;
- patterning the second metal layer to form a first array of wires;
- backfilling the second metal layer with a second insulating layer after the patterning of the second metal layer;
- depositing a second sacrificial layer upon the second metal layer and the second insulating layer;
- etching a portion of the second sacrificial layer down to the second insulating layer;
- backfilling the portion of the second sacrificial layer with a third insulating layer;
- depositing a third metal layer upon the second sacrificial layer and the third insulating layer;
- patterning the third metal layer to form a second array of wires;
- backfilling the third metal layer with a fourth insulating layer after the patterning of the third metal layer;
- drilling a plurality of vias from the fourth insulating layer down to at least the second sacrificial layer;
- sacrificially etching the first sacrificial layer and the second sacrificial layer to create a cavity in place of the first sacrificial layer and the second sacrificial layer;
- filling the cavity with a gas that ionizes in response to nuclear radiation, using the plurality of vias;
- and
- encapsulating the plurality of vias to seal the gas within the cavity.
A method for constructing a radiation detector, the method comprising:
- fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers;
- forming a cavity within the multi-layer structure;
- filling the cavity with a gas that ionizes in response to nuclear radiation;
- and
- sealing the gas within the cavity, wherein the sealing comprises encapsulating a plurality of vias drilled through the multilayer structure and used to provide the gas to the cavity.
Dependencies are inferred from the claim text.