Back to results
US 8,986,569 B2Granted
Flexible multi-layered getter
AssigneeSaes Getters S.P.A.
InventorsRichard Kullberg, Tim Armstrong, Andrea Conte, Enea Rizzi
Life of this patent
Estimating the term…
Abstract
A flexible multi-layer getter with a gas-permeable layer covering a gas reservoir layer. In an embodiment, the gas-permeable layer covers part of the gas reservoir layer. In another embodiment, a barrier covers part of the gas reservoir layer. The barrier may include a foil substrate, a passivation layer, or a gas-permeable layer.
Claims15
A multi-layer getter foil comprising:
- a gas reservoir layer comprising titanium having a first surface and a second surface;
- a gas-permeable layer comprising palladium bonded to the first surface of the gas reservoir layer;
- and a barrier comprising titanium oxide on the second surface of the gas reservoir layer, whereby the titanium oxide barrier is at least partially self-healing when exposed to an oxygen containing atmosphere.
A multi-layer getter foil comprising;
- a gas reservoir layer comprising titanium having a first surface and a second surface;
- a gas-permeable layer comprising palladium bonded to the first surface of the gas reservoir layer;
- and
- a barrier comprising titanium oxide on the second surface of the gas reservoir layer, wherein said barrier was formed by exposing the second surface of the gas reservoir to an oxygen containing atmosphere.
1 more element
A multi-layer getter foil comprising:
- a gas reservoir layer less than about 20 micrometers thick and having a first surface and a second surface, the gas reservoir layer including an alloy of titanium with one or more elements selected from the group consisting of transition metals, Rare Earths, and aluminum;
- a gas-permeable layer less than about 10 micrometers thick, the gas-permeable layer comprising an alloy of palladium and an element selected from the group consisting of tin, gold, boron, lead, silver, and combinations thereof, said alloy of palladium bonded to the first surface of the gas reservoir layer;
- and
- a barrier comprising titanium oxide on the second surface of the gas reservoir layer, wherein said barrier was formed by an oxidation of the second surface of the gas reservoir layer.
1 more element
Dependencies are inferred from the claim text.