Compositions and methods for texturing polycrystalline silicon wafers
AssigneeAvantor Performance Materials, Inc.
InventorsNicolas Hildenbrand, Joannes Theodorus Valentinus Hoogboom, Michiel Scheffer, Raymond Albertus Johannes Ten Broeke
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Abstract
Compositions and methods for chemical texturing a surface of a polycrystalline silicon wafer to be used in the manufacture of solar cells provide increased efficiency in the manufacture and operation of solar cells. The compositions and methods disclosed herein include first and second components, wherein the first component is a UKON etch composition, including a hydrofluoric acid/nitric acid mixture and water, while the second component includes a silicon wafer texturing enhancer (SWTE).
Claims24
A silicon wafer texturing enhancer (SWTE) for use in a UKON etch process, comprising a multi-component process window enhancer in an aqueous system in an amount sufficient to optimize the processing window in a UKON etch process.
A method of chemically texturing a surface of a polycrystalline silicon wafer, said method comprising contacting said surface of said polycrystalline silicon wafer with a composition for a time and at a temperature sufficient to texturize said wafer surface, said composition comprising first and second components, wherein said first component comprises a hydrofluoric acid/nitric acid mixture and water, and said second component comprises a silicon wafer texturing enhancer (SWTE).
A composition for chemical texturing a surface of a polycrystalline silicon wafer, said composition comprising first and second components, wherein said first component comprises a hydrofluoric acid/nitric acid mixture and water, and said second component comprises a silicon wafer texturing enhancer (SWTE).
Dependencies are inferred from the claim text.