Film for semiconductor device production, method for producing film for semiconductor device production, and method for semiconductor device production
AssigneeNitto Denko Corporation
InventorsNaohide Takamoto, Goji Shiga, Fumiteru Asai
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Abstract
The present invention relates to a film for semiconductor device production, which includes: a separator; and a plurality of adhesive layer-attached dicing tapes each including a dicing tape and an adhesive layer laminated on the dicing tape, which are laminated on the separator at a predetermined interval in such a manner that the adhesive layer attaches to the separator, in which the separator has a cut formed along the outer periphery of the dicing tape, and the depth of the cut is at most ⅔ of the thickness of the separator.
Claims3
A film for semiconductor device production, which comprises:
- a separator;
- and
- a plurality of adhesive layer-attached dicing tapes each comprising a dicing tape comprising a base material and a pressure-sensitive adhesive layer provided on the base material, and an adhesive layer laminated on the pressure-sensitive adhesive layer, wherein the plurality of adhesive layer-attached dicing tapes are laminated on the separator at a predetermined interval in such a manner that the adhesive layer attaches to the separator,
- wherein the separator has a cut formed along the outer periphery of the dicing tape,
- wherein the depth of the cut is at most ⅔ of the thickness of the separator,
- wherein an outermost circumferential edge of the adhesive layer defines an outermost diameter of the adhesive layer and an outermost circumferential edge of the dicing tape defines an outermost diameter of the dicing tape,
- wherein the outermost diameter of the adhesive layer is smaller than the outermost diameter of the dicing tape, and
- wherein the adhesive layer contains a coloring agent.
Dependencies are inferred from the claim text.