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AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsTino Harig, Markus Höfer, Artur Laukart, Lothar Schäfer, Markus Armgardt
Estimating the term…
A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.
A coating device, comprising at least one vacuum chamber, the vacuum chamber being adapted to be evacuated and being adapted to receiving a substrate, at least one gas supply device, by means of which at least one gaseous precursor can be introduced into the vacuum chamber, and at least one heatable activation element, the heatable activation element being a predeterminable longitudinal extent and being fastened immovably in relation to the vacuum chamber by means of at least two dedicated mechanical fastening devices, wherein an electrical current can be supplied to the activation element by way of at least two contact elements, at least one of the contact elements being designed to contact the activation element at changing contact positions between the at least two fastening devices.
A coating device, comprising at least one vacuum chamber, the vacuum chamber being adapted to be evacuated and being adapted to recieve a substrate, at least one gas supply device, by means of which at least one gaseous precursor can be introduced into the vacuum chamber, and at least one heatable activation element, the heatable activation element having a predeterminable longitudinal extent and being fastened immovably in relation to the vacuum chamber by at least two dedicated mechanical fastening devices, wherein an electrical current can be supplied to the activation element by way of at least two contact elements, at least one of the contact elements being designed to contact the activation element at changing contact positions between the at least two fastening devices, wherein the contact element comprises a plurality of contact pins, which are arranged along the longitudinal extent of the activation element and can be moved toward the activation element.
Dependencies are inferred from the claim text.