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US 8,985,747 B2Granted
Piezoelectric element, liquid ejecting head, liquid ejecting apparatus and piezoelectric device
AssigneeSeiko Epson Corporation
InventorsTomohiro Sakai, Tatsushi Kato
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Abstract
Provided is a piezoelectric element that has a first electrode, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD).
Claims10
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric layer provided on the first electrode;
- and
- a second electrode provided on the piezoelectric layer,
- wherein an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD).
2 more elements
Dependencies are inferred from the claim text.