Liquid jet head, liquid jet apparatus, and method of manufacturing liquid jet head
AssigneeSii Printek Inc.
InventorYuzuru Kubota
Life of this patent
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Abstract
A liquid jet head has an actuator substrate, a cover plate and a nozzle plate. The actuator substrate includes a groove array formed by alternately arraying an ejection groove and a dummy groove, and a common chamber communicating with one end of the ejection groove but not communicating with the dummy groove. The cover plate is provided on a top surface of the actuator substrate so as to cover the groove array, and includes one chamber communicating with the common chamber and another chamber communicating with another end of the ejection groove. The nozzle plate is provided on a bottom surface of the actuator substrate so as to cover the groove array, and includes a nozzle communicating with the ejection groove.
Claims21
A liquid jet head, comprising:
- an actuator substrate including a groove array formed by alternately arraying an ejection groove and a dummy groove, and a common chamber communicating with one end of the ejection groove but not communicating with the dummy groove;
- a cover plate including one chamber communicating with the common chamber and another chamber communicating with another end of the ejection groove, the cover plate being provided on a top surface of the actuator substrate so as to cover the groove array;
- and
- a nozzle plate including a nozzle communicating with the ejection groove, the nozzle plate being provided on a bottom surface of the actuator substrate so as to cover the groove array.
A method of manufacturing a liquid jet head, comprising:
- a groove formation step of forming a first groove array in which first ejection grooves are alternately arrayed with first dummy grooves, and forming a second groove array in which second ejection grooves are alternately arrayed with second dummy grooves, the first and second groove arrays being formed in parallel on an actuator substrate including a piezoelectric material;
- a common chamber formation step of forming, on the actuator substrate between the first groove array and the second groove array, a common chamber communicating with each one end of the first and second ejection grooves but not communicating with the first and second dummy grooves;
- a cover plate formation step of forming, on a cover plate, one chamber, and forming a first chamber and a second chamber with the one chamber disposed therebetween;
- a first adhesion step of adhering the cover prate to a top surface of the actuator subs rate by communicating the one chamber with the common chamber, by communicating the first chamber with another end of the first ejection groove, and by communicating the second chamber with another end of the second ejection groove;
- and
- a second adhesion step of adhering a nozzle plate including a first nozzle and a second nozzle to a bottom surface of the actuator substrate by communicating the first nozzle with the first ejection groove and by communicating the second nozzle with the second ejection groove.
Dependencies are inferred from the claim text.