Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same

A parallel slider device, comprising:

• a first guide rail and a second guide rail that are disposed parallel to each other;
• a first slider and a second slider slidably supported by the first and second guide rails, respectively, along a lengthwise direction of the guide rails;
• a first pneumatic linear guide providing an air gap between the first guide rail and the first slider;
• and
• a second pneumatic linear guide providing an air gap between the second guide rail and the second slider;
• wherein the first and second sliders are mechanically coupled to each other, and wherein a size of the air gap between the first slider and the first guide rail is set to be different from a size of the air gap between the second slider and the second guide rail, whereby a slider supporting stiffness of the first pneumatic linear guide is different from that of the second pneumatic linear guide.

A parallel slider device, comprising:

• a first guide rail and a second guide rail that are disposed parallel to each other;
• a first slider and a second slider slidably supported by the first and second guide rails, respectively, along a lengthwise direction of the guide rails;
• a first pneumatic linear guide providing an air gap between the first guide rail and the first slider;
• and
• a second pneumatic linear guide providing an air gap between the second guide rail and the second slider;
• wherein the first and second sliders are mechanically coupled to each other, and wherein the first and second pneumatic linear guides are each provided with a static pressure air pocket, an opening area of the static pressure air pocket for the first pneumatic linear guide being configured differently from an opening area of the static pressure air pocket for the second pneumatic linear guide, whereby a slider supporting stiffness of the first pneumatic linear guide is different from that of the second pneumatic linear guide.

A parallel slider device, comprising:

• a first guide rail and a second guide rail that are disposed parallel to each other;
• a first slider and a second slider slidably supported by the first and second guide rails, respectively, along a lengthwise direction of the guide rails;
• a first pneumatic linear guide providing an air gap between the first guide rail and the first slider;
• and
• a second pneumatic linear guide providing an air gap between the second guide rail and the second slider;
• wherein the first and second sliders are mechanically coupled to each other, and wherein a diameter of an air ejection port for supplying a pneumatic pressure to the air gap of the first pneumatic linear guide is set to be different from a diameter of an air ejection port for supplying a pneumatic pressure to the air gap of the second pneumatic linear guide, whereby a slider supporting stiffness of the first pneumatic linear guide is different from that of the second pneumatic linear guide.

A parallel slider device, comprising:

• a first guide rail and a second guide rail that are disposed parallel to each other;
• a first slider and a second slider slidably supported by the first and second guide rails, respectively, along a lengthwise direction of the guide rails;
• a first pneumatic linear guide providing an air gap between the first guide rail and the first slider;
• and
• a second pneumatic linear guide providing an air gap between the second guide rail and the second slider;
• wherein the first and second sliders are mechanically coupled to each other, and wherein a pressure receiving area of the first pneumatic linear guide for the first slider is set to be different from a pressure receiving area of the second pneumatic linear guide for the second slider by making lengthwise dimensions of the first and second sliders different from each other, whereby a slider supporting stiffness of the first pneumatic linear guide is different from that of the second pneumatic linear guide.