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US 8,984,942 B2Granted
Suspended masses in micro-mechanical devices
AssigneeHewlett-Packard Development Company, L.P.
InventorBrian D. Homeijer
Life of this patent
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Abstract
The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate.
Claims15
A micro-mechanical device comprising:
- a substrate comprising an internal cavity, a first surface, and an opposing second surface;
- a first trench formed through the first surface of the substrate into the internal cavity, the first trench at least partially defining flexures;
- and
- a second trench formed through the second surface of the substrate into the internal cavity, the second trench at least partially defining a suspended mass, in which the suspended mass is connected by the flexures to the substrate, in which the flexures are sandwiched between sides of the suspended mass and the surrounding substrate;
- in which the second trench is narrower than the first trench such that under acceleration the second trench closes before the first trench and limits motion of the suspended mass.
2 more elements
Dependencies are inferred from the claim text.