Atomizing method for producing synthetic quartz glass
AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsHeinz Fabian, Juergen Roeper
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AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsHeinz Fabian, Juergen Roeper
Estimating the term…
The present invention relates to a method for producing synthetic quartz glass, comprising the steps of: providing a liquid SiO2 feedstock material (105), which comprises more than 70% by wt. of the octamethylcyclotetrasiloxane D4, vaporizing the SiO2 feedstock material (105) into a gaseous SiO2 feedstock vapor (107), converting the SiO2 feedstock vapor (107) into SiO2 particles, depositing the SiO2 particles on a deposition surface (160) while forming a SiO2 soot body (200), vitrifying the SiO2 soot body (200) while forming the synthetic quartz glass. According to the invention it is provided that vaporizing the heated SiO2 feedstock material (105) comprises an injection phase in an expansion chamber (125) in which the heated SiO2 feedstock material (105) is atomized into droplets, the droplets having a mean diameter of less than 5 pm, preferably less than 2 μm.
A method for producing synthetic quartz glass, said method comprising:
Dependencies are inferred from the claim text.