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US 8,980,968 B2Granted
Photosensitive resin composition, method for producing structure, and liquid discharge head
AssigneeCanon Kabushiki Kaisha
InventorsHyo Takahashi, Ken Ikegame, Masako Shimomura
Life of this patent
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Abstract
A photosensitive resin composition includes (a) a compound polymerizable in the presence of an acid, and (b) a photoacid generating agent including an onium salt having a cationic part structure represented by formula (b1) below and an anionic part structure represented by formula (b2) below, wherein the component (b) absorbs 50% or more of the amount of 365 nm wavelength light absorbed by the photosensitive resin composition,
Claims15
A photosensitive resin composition comprising:
- (a) a compound polymerizable in the presence of an acid;
- (b) a photoacid generating agent comprising an onium salt having a cationic part structure represented by formula (b1) below and an anionic part structure represented by formula (b2) below;
- and
- (c) a compound capable of deactivating an acid produced from the component (b) after exposure to light,
- wherein the component (b) absorbs at least 50% of the amount of 365 nm wavelength light absorbed by the photosensitive resin composition,
- wherein R1 to R3 each independently represent an organic group of 1 to 30 carbon atoms, R1 to R3 represent structures containing at least two oxygen atoms and comprising at least one organic group selected from a thioxanthone skeleton, a 9,10-dialkoxyanthracene skeleton, or an anthraquinone skeleton, X is selected from a carbon atom, a nitrogen atom, a phosphorus atom, a boron atom, and an antimony atom, Y is at least one selected from —S(═O)2—, —CF2—O—, —CF2—C(═O)—, —CF2—C(═O)—O—, and —CF2—O—C(═O)—, or X and R4 are directly bonded to each other, R4 represents a hydrocarbon group of 1 to 30 carbon atoms, provided that when Y represents —S(═O)2— or a single bond, the hydrocarbon group represented by R4 has at least one fluorine atom, and when X represents a carbon atom, m and n represent integers that satisfy m+n=3 and n=0 to 2, when X represents a nitrogen atom, m and n represent integers that satisfy m+n=2 and n=0 to 1, when X represents a phosphorus or antimony atom, m and n represent integers that satisfy m+n=6 and n=0 to 6, or when X represents a boron atom, m and n represent integers that satisfy m+n=4 and n=0 to 3.
3 more elements
A method for producing a structure, the method comprising in this order:
- providing a substrate provided with a layer of a photosensitive resin composition for forming a structure, the photosensitive resin composition comprising:
- (a) a compound polymerizable in the presence of an acid;
- (b) a photoacid generating agent comprising an onium salt having a cationic part structure represented by formula (b1) below and an anionic part structure represented by formula (b2) below;
- and
- (c) a compound capable of deactivating an acid produced from the component (b) after exposure to light,
- wherein the component (b) absorbs at least 50% of the amount of 365 nm wavelength light absorbed by the photosensitive resin composition,
- wherein R1 to R3 each independently represent an organic group of 1 to 30 carbon atoms, R1 to R3 represent structures containing at least two oxygen atoms and comprising at least one organic group selected from a thioxanthone skeleton, a 9,10-dialkoxyanthracene skeleton, or an anthraquinone skeleton, X is selected from a carbon atom, a nitrogen atom, a phosphorus atom, a boron atom, and an antimony atom, Y is at least one selected from —S(═O)2—, —CF2—O—, —CF2—C(═O)—, —CF2—C(═O)—O—, and —CF2—O—C(═O)—, or X and R4 are directly bonded to each other, R4 represents a hydrocarbon group of 1 to 30 carbon atoms, provided that when Y represents —S(═O)2— or a single bond, the hydrocarbon group represented by R4 has at least one fluorine atom, and when X represents a carbon atom, m and n represent integers that satisfy m+n=3 and n=0 to 2, when X represents a nitrogen atom, m and n represent integers that satisfy m+n=2 and n=0 to 1, when X represents a phosphorus or antimony atom, m and n represent integers that satisfy m+n=6 and n=0 to 6, or when X represents a boron atom, m and n represent integers that satisfy m+n=4 and n=0 to 3;
- exposing the layer to light, then curing the exposed part and removing the uncured part;
- and
- heating the cured part at a temperature of at least 140 degrees Celsius to form a structure.
7 more elements
A liquid discharge head comprising:
- a discharge port member having a discharge port configured to discharge a liquid,
- wherein the discharge port member is made of a product of curing of a photosensitive resin composition comprising:
- (a) a compound polymerizable in the presence of an acid;
- and
- (b) a photoacid generating agent comprising an onium salt having a cationic part structure represented by formula (b1) below and an anionic part structure represented by formula (b2) below,
- wherein the component (b) absorbs at least 50% of the amount of 365 nm wavelength light absorbed by the photosensitive resin composition,
- wherein R1 to R3 each independently represent an organic group of 1 to 30 carbon atoms, R1 to R3 represent structures containing at least two oxygen atoms and comprising at least one organic group selected from a thioxanthone skeleton, a 9,10-dialkoxyanthracene skeleton, or an anthraquinone skeleton, X is selected from a carbon atom, a nitrogen atom, a phosphorus atom, a boron atom, and an antimony atom, Y is at least one selected from —S(═O)2—, —CF2—O—, —CF2—C(═O)—, —CF2—C(═O)—O—, and —CF2—O—C(═O)—, or X and R4 are directly bonded to each other, R4 represents a hydrocarbon group of 1 to 30 carbon atoms, provided that when Y represents —S(═O)2— or a single bond, the hydrocarbon group represented by R4 has at least one fluorine atom, and when X represents a carbon atom, m and n represent integers that satisfy m+n=3 and n=0 to 2, when X represents a nitrogen atom, m and n represent integers that satisfy m+n=2 and n=0 to 1, when X represents a phosphorus or antimony atom, m and n represent integers that satisfy m+n=6 and n=0 to 6, or when X represents a boron atom, m and n represent integers that satisfy m+n=4 and n=0 to 3.
4 more elements
Dependencies are inferred from the claim text.