Crucible and method for pulling a single crystal
AssigneeJapan Super Quartz Corporation
InventorsMasaru Sato, Masaki Morikawa
Life of this patent
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Abstract
A crucible for pulling a silicon single crystal has a double structure comprising a silica crucible and a graphite crucible covering an outside of the silica crucible, wherein the silica crucible is provided at its opening end portion with an inward falling prevention means for imparting a radially outward force to a body portion of the silica crucible.
Claims15
A crucible for pulling a silicon single crystal, the crucible having a double structure comprising a silica crucible and a graphite crucible covering an outside portion of the silica crucible, wherein the silica crucible comprises, at an opening end portion, an inward falling prevention means configured to impart a radially outward force on a body portion of the silica crucible, wherein the inward falling prevention means is constructed at the opening end portion of the silica crucible as a diameter-expanded portion with a taperingly inclined part extending at an angle of 5° to 40° with respect to an upwardly extending direction of an inner surface of the body portion in the silica crucible at a point of separating from an opening end of the graphite crucible, and wherein the diameter-expanded portion has a protruding portion protruding in the radially outward direction at an angle with respect to the diameter-expanded portion.
A crucible for pulling a silicon single crystal, the crucible having a double structure comprising a silica crucible and a graphite crucible covering an outside portion of the silica crucible, wherein the silica crucible comprises, at an opening end portion, an inward falling prevention means configured to impart a radially outward force on a body portion of the silica crucible, wherein the inward falling prevention means is constructed at the opening end portion of the silica crucible as a diameter-expanded portion with a taperingly inclined part extending at an angle of 5° to 40° with respect to an upwardly extending direction of an inner surface of the body portion in the silica crucible at a point of separating from an opening end of the graphite crucible, and wherein the diameter-expanded portion has a protruding portion having a thickness in the radially outward direction that is greater than a thickness of the diameter-expanded portion.
A crucible for pulling a silicon single crystal, the crucible having a double structure comprising a silica crucible and a graphite crucible covering an outside portion of the silica crucible, wherein the silica crucible comprises, at an opening end portion, an inward falling prevention means configured to impart a radially outward force on a body portion of the silica crucible, wherein the inward falling prevention means is constructed at the opening end portion of the silica crucible as a diameter-expanded portion with a taperingly inclined part extending at an angle of 5° to 40° with respect to an upwardly extending direction of an inner surface of the body portion in the silica crucible at a point of separating from an opening end of the graphite crucible, and wherein the diameter-expanded portion terminates in a protruding portion curving in the radially outward direction.
Dependencies are inferred from the claim text.