MEMS proof mass with split z-axis portions
AssigneeFairchild Semiconductor Corporation
InventorCenk Acar
Life of this patent
Estimating the term…
Abstract
This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
Claims18
A proof-mass for an accelerometer, the proof mass comprising:
- a center portion configured to anchor the proof-mass to an adjacent layer;
- a first z-axis portion of the proof mass configured to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis;
- a second z-axis portion of the proof mass configured to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane;
- wherein the first z-axis portion is configured to rotate independent of the second z-axis portion;
- and
- wherein the central portion includes an anchor portion and an x-axis proof mass portion, the x-axis proof mass portion configured to deflect, with respect to the anchor portion, in response to an acceleration of the proof mass along the x-axis.
An apparatus comprising:
- a single proof mass accelerometer, the single proof mass accelerometer including:
- a proof mass structure formed in the x-y plane of a device layer, the proof mass structure including:
- a central portion including:
- a single, central anchor, configured to suspend the proof mass structure ;
- and
- separate x and y, flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor;
- a first z-axis portion configured to rotate about a first axis in the x-y plane using a first hinge, the first hinge coupled to the central portion;
- a second z-axis portion configure to rotate about a second axis in the x-y plane using a second hinge, the second hinge coupled to the central portion;
- wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
Dependencies are inferred from the claim text.