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US 8,973,439 B1Granted
MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
AssigneeInvenSense, Inc.
InventorsLeonardo Baldasarre, Matthew J. Thompson
Life of this patent
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Abstract
A sensor is disclosed. The sensor includes a substrate and at least two proof masses. The sensor also includes a flexible coupling between the at least two proof masses and the substrate. The at least two coupling proof masses move in an anti-phase direction normal to a plane of the substrate in response to acceleration.
Claims22
A sensor comprising:
- a substrate;
- and
- a mechanical structure, wherein the mechanical structure includes
- at least two proof masses including a first proof mass and a second proof mass, and
- a flexible coupling between the at least two proof masses and the substrate;
- wherein the at least two proof masses move in an anti-phase direction normal to a plane of the substrate in response to acceleration of the sensor via an unbalancing torque.
3 more elements
A sensor comprising:
- a substrate;
- and
- a mechanical structure, wherein the mechanical structure includes
- at least two proof masses,
- a flexible coupling between the at least two proof masses and the substrate,
- a magnetic material;
- wherein the mechanical structure rotates around a first axis in response to a magnetic field;
- wherein the at least two proof masses move in an anti-phase direction normal to a plane of the substrate in response to acceleration of the sensor via an unbalancing torque.
5 more elements
Dependencies are inferred from the claim text.