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US 8,968,587 B2Granted
Graphene nano ribbons and methods of preparing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyeon-jin Shin, Jae-young Choi, Young-hee Lee, Gang-hee Han
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Abstract
Methods of preparing graphene nano ribbons may include forming a graphene sheet on at least one surface of a substrate, forming a plasma mask having a nano pattern on the graphene sheet, and forming a nano pattern on the graphene sheet by plasma treating a stack structure on which the plasma mask is formed.
Claims15
A method of preparing a graphene nano ribbon, the method comprising:
- depositing a graphene sheet on at least one surface of a substrate;
- forming a plasma mask with a nano ribbon pattern on the graphene sheet;
- and
- forming a nano ribbon pattern in the graphene sheet by plasma treating a stack structure including the plasma mask to obtain a graphene nano ribbon,
- wherein the forming of the plasma mask includes:
- stacking amorphous carbon on the graphene sheet;
- and
- forming the nano ribbon pattern in the amorphous carbon by irradiating the amorphous carbon with light to obtain the plasma mask.
5 more elements
A method of preparing a grapheme nano ribbon, the method comprising:
- forming a carbon mask on a graphene sheet, the carbon mask comprising a carbon layer including amorphous carbon, the graphene sheet including at least one graphene layer, and
- plasma treating the graphene sheet to form a graphene nano ribbon.
Dependencies are inferred from the claim text.