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US 8,968,058 B2Granted
Polishing pad with alignment feature
AssigneeNexPlanar Corporation
InventorsRobert Kerprich, William C. Allison, Diane Scott
Life of this patent
Estimating the term…
Abstract
Polishing pads with alignment marks are described. Methods of fabricating polishing pads with alignment marks are also described.
Claims16
A polishing pad for polishing a substrate, the polishing pad comprising:
- a polishing body having a polishing surface and a back surface, the polishing surface having a pattern of grooves comprising a polishing region, wherein the polishing region of the pattern of grooves comprises an alignment feature creating a singular asymmetry within the pattern of grooves, wherein the pattern of grooves comprises a plurality of circumferential grooves intersecting with a plurality of radial grooves, and wherein the alignment feature comprises an interruption in one of the circumferential grooves, the interruption disposed between two radial grooves.
A polishing pad for polishing a substrate, the polishing pad comprising:
- a polishing body having a polishing surface and a back surface, the polishing surface having a pattern of grooves comprising a polishing region, wherein the pattern of grooves comprises a plurality of circumferential grooves intersecting with a plurality of radial grooves, and wherein the polishing region of the pattern of grooves comprises an alignment feature comprising an interruption in one of the circumferential grooves, the interruption disposed between two radial grooves.
Dependencies are inferred from the claim text.