Fluid control valve
AssigneeHORIBA STEC, Co., Ltd.
InventorShigeyuki Hayashi
Life of this patent
Estimating the term…
Abstract
In order to provide a fluid control valve that can flow a large amount of fluid with a compact arrangement, ring-shaped bottom formed grooves that are in communication with an upstream side flow channel through a valve inner flow channel and ring-shaped bottom formed grooves that are in communication with a downstream side flow channel through a valve inner flow channel are arranged alternatively and plurally between a seating surface and a valve seat surface, and a communication bore, which is an opening in communication with the bottom formed groove of the valve inner flow channel, is formed at least on the side surface of the bottom formed groove.
Claims10
A fluid control valve comprising a pair of valve members, on one of which is formed a seating surface and on the other of which is formed a valve seat surface, wherein
- generally ring-shaped first bottom formed grooves that are in communication with an outside upstream side flow channel through a first valve inner flow channel arranged inside of the valve member and generally ring-shaped second bottom formed grooves that are in communication with an outside downstream side flow channel through a second valve inner flow channel arranged inside of the valve member are alternately arranged on either one of the seating surface and the valve seat surface,
- in a state that the seating surface and the valve seat surface are in contact with each other, communication between an opening of the first bottom formed groove and an opening of the second bottom formed groove is blocked so as to be in a closed state wherein the upstream side flow channel is not connected to the downstream side flow channel, and in a state that the seating surface is separated from the valve seat surface, the opening of the first bottom formed groove is in communication with the opening of the second bottom formed groove through a gap between the seating surface and the valve seat surface so as to be in an open state wherein the upstream side flow channel is connected to the downstream side flow channel, and
- a communication bore in communication with the first or second bottom formed groove of the first or second valve inner flow channel is formed at least on a side surface of the first or second bottom formed groove.
A fluid control valve comprising a pair of valve members on one of which is formed a seating surface and on the other of which is formed a valve seat surface, wherein
- generally ring-shaped first bottom formed grooves that are in communication with an outside upstream side flow channel through a first valve inner flow channel arranged inside of one of the valve members are arranged in multiple layers on either one of the seating surface and the valve seat surface and generally ring-shaped second bottom formed grooves that are in communication with an outside downstream side flow channel through a second valve inner flow channel arranged inside of the other valve member are arranged at each position between adjacent first bottom formed grooves in multiple layers on the other of the seating surface and the valve seat surface,
- in a state that the seating surface and the valve seat surface are in contact with each other, communication between an opening of the first bottom formed groove and an opening of the second bottom formed groove is blocked so as to be in a closed state wherein the upstream side flow channel is not connected to the downstream side flow channel, and in a state that the seating surface is separated from the valve seat surface, the opening of the first bottom formed groove is in communication with the opening of the second bottom formed groove through a gap between the seating surface and the valve seat surface so as to be in an open state wherein the upstream side flow channel is connected to the downstream side flow channel, and
- a communication bore that is in communication with the bottom formed groove of the valve inner flow channel is formed at least on a side surface of the bottom formed groove.
Dependencies are inferred from the claim text.