US 8,966,996 B2Granted

Force sensor

AssigneeTri-Force Management Corporation

InventorsKazuhiro Okada, Nobuhisa Nishioki

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Abstract

With the Z-axis given as a central axis, on an XY-plane, arranged are a rigid force receiving ring, a flexible detection ring inside thereof, and a cylindrical fixed assistant body further inside thereof. Two fixing points on the detection ring are fixed to a supporting substrate, and two exertion points are connected to the force receiving ring via connection members. When force and moment are exerted on the force receiving ring, with the supporting substrate fixed, the detection ring undergoes elastic deformation. Capacitance elements or others are used to measure distances between measurement points and the fixed assistant body and distances between the measurement points and the supporting substrate. Elastic deformation of the detection ring is recognized for mode and magnitude, thereby detecting a direction and magnitude of force or moment which is exerted.

Claims26

Dependent claims

A force sensor detecting force or moment with regard to at least one axis, among force in a direction of each coordinate axis and moment around each coordinate axis, in an XYZ three-dimensional orthogonal coordinate system,

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside or outside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
four exertion points and four fixing points are arranged on an annular channel along a contour of the detection ring in an order of a first exertion point, a first fixing point, a second exertion point, a second fixing point, a third exertion point, a third fixing point, a fourth exertion point and a fourth fixing point;
vicinity of the first exertion point on the detection ring constitutes a first diaphragm thinner in thickness than other parts, vicinity of the second exertion point on the detection ring constitutes a second diaphragm thinner in thickness than other parts, vicinity of the third exertion point on the detection ring constitutes a third diaphragm thinner in thickness than other parts, vicinity of the fourth exertion point on the detection ring constitutes a fourth diaphragm thinner in thickness than other parts;
four connection members are respectively connected to the first to the fourth diaphragms;
and
the detection element electrically detects elastic deformation of the first to the fourth diaphragms.

13 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a fixed assistant body whose lower surface is fixed onto the upper surface of the supporting substrate, said fixed assistant body being located further inside the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point via the fixed assistant body ;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
and
an inner circumferential surface of the detection ring is connected to an outer circumferential surface of the fixed assistant body via the fixing member.

11 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a fixed assistant body whose lower surface is fixed onto the upper surface of the supporting substrate, said fixed assistant body being located further inside the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point via the fixed assistant body;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
an inner circumferential surface of the detection ring is connected to an outer circumferential surface of the fixed assistant body via the fixing member;
and
the detection element electrically detects a distance between a measurement target surface in vicinity of a predetermined measurement point on an inner circumferential surface of the detection ring and a counter reference surface positioned on an outer circumference of the fixed assistant body and facing the measurement target surface.

12 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a fixed assistant body whose lower surface is fixed onto the upper surface of the supporting substrate, said fixed assistant body being located further inside the detection ring,
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
a first exertion point, a first fixing point, a second exertion point, and a second fixing point are arranged respectively at a positive domain of an X-axis, a positive domain of a Y-axis, a negative domain of the X-axis and a negative domain of the Y-axis;
vicinity of the first exertion point on the detection ring is connected to the force receiving ring via a first connection member extending along the positive domain of the X-axis, and vicinity of the second exertion point on the detection ring is connected to the force receiving ring via a second connection member extending along the negative domain of the X-axis;
defining a V-axis which passes through an origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the first quadrant of the XY-plane and with a negative domain positioned at the third quadrant of the XY-plane and forms 45 degrees with respect to the X-axis, and a W-axis which passes through the origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the second quadrant of the XY-plane and with a negative domain positioned at the fourth quadrant of the XY-plane and is orthogonal to the V-axis, a first measurement point, a second measurement point, a third measurement point and a fourth measurement point are arranged respectively at the positive domain of the V-axis, the positive domain of the W-axis, the negative domain of the V-axis and the negative domain of the W-axis;
both the force receiving ring and the detection ring are circular rings arranged on the XY-plane so that the Z-axis is given as a central axis, and the fixed assistant body is a cylindrical body with the Z-axis being given as a central axis;
the detection element comprises:
a first capacitive element including a first displacement electrode arranged in vicinity of the first measurement point on an inner circumferential surface of the detection ring and a first fixed electrode arranged at a position facing the first displacement electrode on an outer circumferential surface of the fixed assistant body;
a second capacitive element including a second displacement electrode arranged in vicinity of the second measurement point on the inner circumferential surface of the detection ring and a second fixed electrode arranged at a position facing the second displacement electrode on the outer circumferential surface of the fixed assistant body;
a third capacitive element including a third displacement electrode arranged in vicinity of the third measurement point on the inner circumferential surface of the detection ring and a third fixed electrode arranged at a position facing the third displacement electrode on the outer circumferential surface of the fixed assistant body;
a fourth capacitive element including a fourth displacement electrode arranged in vicinity of the fourth measurement point on the inner circumferential surface of the detection ring and a fourth fixed electrode arranged at a position facing the fourth displacement electrode on the outer circumferential surface of the fixed assistant body;
a fifth capacitive element including a fifth displacement electrode arranged in vicinity of the first measurement point on a lower surface of the detection ring and a fifth fixed electrode arranged at a position facing the fifth displacement electrode on the upper surface of the supporting substrate;
a sixth capacitive element including a sixth displacement electrode arranged in vicinity of the second measurement point on the lower surface of the detection ring and a sixth fixed electrode arranged at a position facing the sixth displacement electrode on the upper surface of the supporting substrate;
a seventh capacitive element including a seventh displacement electrode arranged in vicinity of the third measurement point on the lower surface of the detection ring and a seventh fixed electrode arranged at a position facing the seventh displacement electrode on the upper surface of the supporting substrate;
and
an eighth capacitive element including an eighth displacement electrode arranged in vicinity of the fourth measurement point on the lower surface of the detection ring and an eighth fixed electrode arranged at a position facing the eighth displacement electrode on the upper surface of the supporting substrate;
a projection image of one of a pair of electrodes constituting said capacitive elements projected on a surface on which the other of said pair of electrodes is formed is included in the other electrode;
and
when a capacitance value of the first capacitive element is given as Cl, a capacitance value of the second capacitive element is given as C2, a capacitance value of the third capacitive element is given as C3, a capacitance value of the fourth capacitive element is given as C4, a capacitance value of the fifth capacitive element is given as C5, a capacitance value of the sixth capacitive element is given as C6, a capacitance value of the seventh capacitive element is given as C7, and a capacitance value of the eighth capacitive element is given as C8, the detection circuit outputs detection values of force Fx in a direction of the X-axis, force Fy in a direction of the Y-axis, force Fz in a direction of the Z-axis, moment Mx around the X-axis, moment My around the Y-axis and moment Mz around the Z-axis on the basis of the following arithmetic expressions:
Fx=(C1+C4)−(C2+C3)
Fy=(C3+C4)−(C1+C2)
Fz=−(C5+C6+C7+C8)
Mx=(C7+C8)−(C5+C6)
My=(C5+C8)−(C6+C7)
Mz=(C2+C4)−(C1+C3).

32 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a fixed assistant body whose lower surface is fixed onto the upper surface of the supporting substrate, said fixed assistant body being located further inside the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
a first exertion point, a first fixing point, a second exertion point, and a second fixing point are arranged respectively at a positive domain of an X-axis, a positive domain of a Y-axis, a negative domain of the X-axis and a negative domain of the Y-axis;
vicinity of the first exertion point on the detection ring is connected to the force receiving ring via a first connection member extending along the positive domain of the X-axis, and vicinity of the second exertion point on the detection ring is connected to the force receiving ring via a second connection member extending along the negative domain of the X-axis;
defining a V-axis which passes through an origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the first quadrant of the XY-plane and with a negative domain positioned at the third quadrant of the XY-plane and forms 45 degrees with respect to the X-axis, and a W-axis which passes through the origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the second quadrant of the XY-plane and with a negative domain positioned at the fourth quadrant of the XY-plane and is orthogonal to the V-axis, a first measurement point, a second measurement point, a third measurement point and a fourth measurement point are arranged respectively at the positive domain of the V-axis, the positive domain of the W-axis, the negative domain of the V-axis and the negative domain of the W-axis;
both the force receiving ring and the detection ring are circular rings arranged on the XY-plane so that the Z-axis is given as a central axis, and the fixed assistant body is a cylindrical body with the Z-axis being given as a central axis;
with the first exertion point given as a fifth measurement point and the second exertion point given as a sixth measurement point, the detection element comprises:
a first capacitive element including a first displacement electrode arranged in vicinity of the first measurement point on an inner circumferential surface of the detection ring and a first fixed electrode arranged at a position facing the first displacement electrode on an outer circumferential surface of the fixed assistant body;
a second capacitive element including a second displacement electrode arranged in vicinity of the second measurement point on the inner circumferential surface of the detection ring and a second fixed electrode arranged at a position facing the second displacement electrode on the outer circumferential surface of the fixed assistant body;
a third capacitive element including a third displacement electrode arranged in vicinity of the third measurement point on the inner circumferential surface of the detection ring and a third fixed electrode arranged at a position facing the third displacement electrode on the outer circumferential surface of the fixed assistant body;
a fourth capacitive element including a fourth displacement electrode arranged in vicinity of the fourth measurement point on the inner circumferential surface of the detection ring and a fourth fixed electrode arranged at a position facing the fourth displacement electrode on the outer circumferential surface of the fixed assistant body;
a fifth capacitive element including a fifth displacement electrode arranged in vicinity of the fifth measurement point on a lower surface of the detection ring and a fifth fixed electrode arranged at a position facing the fifth displacement electrode on the upper surface of the supporting substrate;
and
a sixth capacitive element including a sixth displacement electrode arranged in vicinity of the sixth measurement point on the lower surface of the detection ring and a sixth fixed electrode arranged at a position facing the sixth displacement electrode on the upper surface of the supporting substrate;
a projection image of one of a pair of electrodes constituting said capacitive elements projected on a surface on which the other of said pair of electrodes is formed is included in the other electrode;
and
when a capacitance value of the first capacitive element is given as Cl, a capacitance value of the second capacitive element is given as C2, a capacitance value of the third capacitive element is given as C3, a capacitance value of the fourth capacitive element is given as C4, a capacitance value of the fifth capacitive element is given as C9 and a capacitance value of the sixth capacitive element is given as C10, the detection circuit outputs detection values of force Fx in a direction of the X-axis, force Fy in a direction of the Y-axis, force Fz in a direction of the Z-axis, moment My around the Y-axis and moment Mz around the Z-axis on the basis of the following arithmetic expressions:
Fx=(C1+C4)−(C2+C3)
Fy=(C3+C4)−(C1+C2)
Fz=−(C9+C10)
My=C9−C10
Mz=(C2+C4)−(C1+C3).

29 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
a first exertion point, a first fixing point, a second exertion point, and a second fixing point are arranged respectively at a positive domain of an X-axis, a positive domain of a Y-axis, a negative domain of the X-axis and a negative domain of the Y-axis;
vicinity of the first exertion point on the detection ring is connected to the force receiving ring via a first connection member extending along the positive domain of the X-axis, and vicinity of the second exertion point on the detection ring is connected to the force receiving ring via a second connection member extending along the negative domain of the X-axis;
defining a V-axis which passes through an origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the first quadrant of the XY-plane and with a negative domain positioned at the third quadrant of the XY-plane and forms 45 degrees with respect to the X-axis, and a W-axis which passes through the origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the second quadrant of the XY-plane and with a negative domain positioned at the fourth quadrant of the XY-plane and is orthogonal to the V-axis, a first measurement point, a second measurement point, a third measurement point and a fourth measurement point are arranged respectively at the positive domain of the V-axis, the positive domain of the W-axis, the negative domain of the V-axis and the negative domain of the W-axis;
both the force receiving ring and the detection ring are circular rings arranged on the XY-plane so that the Z-axis is given as a central axis;
the detection element includes a plurality of strain gauges attached onto surfaces in vicinity of each of the first to the fourth measurement points of the detection ring so that a direction along an annular channel along a contour of the detection ring is a detection direction;
when one of an inner circumferential surface and an outer circumferential surface of the detection ring is defined as a laterally arranged surface and one of an upper surface and a lower surface of the detection ring is defined as a longitudinally arranged surface, each of the plurality of strain gauges is constituted by any one of strain gauges having the following eight attributes:
a strain gauge having a first attribute which is attached in vicinity of the first measurement point on the laterally arranged surface,
a strain gauge having a second attribute which is attached in vicinity of the second measurement point on the laterally arranged surface,
a strain gauge having a third attribute which is attached in vicinity of the third measurement point on the laterally arranged surface,
a strain gauge having a fourth attribute which is attached in vicinity of the fourth measurement point on the laterally arranged surface,
a strain gauge having a fifth attribute which is attached in vicinity of the first measurement point on the longitudinally arranged surface,
a strain gauge having a sixth attribute which is attached in vicinity of the second measurement point on the longitudinally arranged surface,
a strain gauge having a seventh attribute which is attached in vicinity of the third measurement point on the longitudinally arranged surface, and
a strain gauge having an eighth attribute which is attached in vicinity of the fourth measurement point on the longitudinally arranged surface;
and
a detection circuit outputs:
a detection value of force Fx in a direction of the X-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the fourth attribute are given as first opposite sides, and a strain gauge having the second attribute and a strain gauge having the third attribute are given as second opposite sides;
a detection value of force Fy in a direction of the Y-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the second attribute are given as first opposite sides, and a strain gauge having the third attribute and a strain gauge having the fourth attribute are given as second opposite sides;
a detection value of moment Mx around the X-axis by a Wheatstone bridge circuit in which a strain gauge having the fifth attribute and a strain gauge having the sixth attribute are given as first opposite sides, and a strain gauge having the seventh attribute and a strain gauge having the eighth attribute are given as second opposite sides;
a detection value of moment My around the Y-axis by a Wheatstone bridge circuit in which a strain gauge having the fifth attribute and a strain gauge having the eighth attribute are given as first opposite sides, and a strain gauge having the sixth attribute and a strain gauge having the seventh attribute are given as second opposite sides;
and
a detection value of moment Mz around the Z-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the third attribute are given as first opposite sides, and a strain gauge having the second attribute and a strain gauge having the fourth attribute are given as second opposite sides.

30 more elements

the force sensor comprising:
a force receiving ring which is arranged on an XY-plane so that a Z-axis is given as a central axis and receives exertions of force or moment to be detected;
a detection ring which is arranged on the XY-plane so that the Z-axis is given as a central axis and also arranged so as to be inside the force receiving ring, at least a part of the detection ring undergoing elastic deformation by exertions of force or moment to be detected;
a supporting substrate which has an upper surface parallel to the XY-plane and is arranged at certain intervals below the force receiving ring and the detection ring;
a connection member which connects the detection ring to the force receiving ring at a predetermined exertion point;
a fixing member which fixes the detection ring to the supporting substrate at a predetermined fixing point;
a detection element which electrically detects elastic deformation of the detection ring;
and
a detection circuit which detects a detection value of force in a predetermined coordinate axis direction or moment around a predetermined coordinate axis which is exerted on the force receiving ring, with the supporting substrate being fixed, on the basis of detection result of the detection element;
wherein
a projection image of the exertion point on the XY-plane and a projection image of the fixing point on the XY-plane are formed at mutually different positions;
a first exertion point, a first fixing point, a second exertion point, and a second fixing point are arranged respectively at a positive domain of an X-axis, a positive domain of a Y-axis, a negative domain of the X-axis and a negative domain of the Y-axis;
vicinity of the first exertion point on the detection ring is connected to the force receiving ring via a first connection member extending along the positive domain of the X-axis, and vicinity of the second exertion point on the detection ring is connected to the force receiving ring via a second connection member extending along the negative domain of the X-axis;
defining a V-axis which passes through an origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the first quadrant of the XY-plane and with a negative domain positioned at the third quadrant of the XY-plane and forms 45 degrees with respect to the X-axis, and a W-axis which passes through the origin O in the XYZ three-dimensional orthogonal coordinate system, with a positive domain positioned at the second quadrant of the XY-plane and with a negative domain positioned at the fourth quadrant of the XY-plane and is orthogonal to the V-axis, a first measurement point, a second measurement point, a third measurement point and a fourth measurement point are arranged respectively at the positive domain of the V-axis, the positive domain of the W-axis, the negative domain of the V-axis and the negative domain of the W-axis;
both the force receiving ring and the detection ring are circular rings arranged on the XY-plane so that the Z-axis is given as a central axis;
said rings are arranged so that the force receiving ring is outside and the detection ring is inside;
the detection elements include a plurality of strain gauges attached onto surface in vicinity of each of the first to the fourth measurement points of the detection ring so that a direction along an annular channel along a contour of the detection ring is a detection direction;
when one of an inner circumferential surface and an outer circumferential surface of the detection ring is defined as a laterally arranged surface, and one of an upper surface and a lower surface of the detection ring is defined as a first longitudinally arranged surface and the other of them is defined as a second longitudinally arranged surface, each of the plurality of strain gauges is constituted by any one of strain gauges having the following 12 different attributes:
a strain gauge having a first attribute which is attached in vicinity of the first measurement point on the laterally arranged surface,
a strain gauge having a second attribute which is attached in vicinity of the second measurement point on the laterally arranged surface,
a strain gauge having a third attribute which is attached in vicinity of the third measurement point on the laterally arranged surface,
a strain gauge having a fourth attribute which is attached in vicinity of the fourth measurement point on the laterally arranged surface,
a strain gauge having a fifth attribute which is attached in vicinity of the first measurement point on the first longitudinally arranged surface of the detection ring,
a strain gauge having a sixth attribute which is attached in vicinity of the second measurement point on the first longitudinally arranged surface of the detection ring,
a strain gauge having a seventh attribute which is attached in vicinity of the third measurement point on the first longitudinally arranged surface of the detection ring,
a strain gauge having an eighth attribute which is attached in vicinity of the fourth measurement point on the first longitudinally arranged surface of the detection ring,
a strain gauge having a ninth attribute which is attached in vicinity of the first measurement point on the second longitudinally arranged surface of the detection ring,
a strain gauge having a tenth attribute which is attached in vicinity of the second measurement point on the second longitudinally arranged surface of the detection ring,
a strain gauge having an eleventh attribute which is attached in vicinity of the third measurement point on the second longitudinally arranged surface of the detection ring, and
a strain gauge having a twelfth attribute which is attached in vicinity of the fourth measurement point on the second longitudinally arranged surface of the detection ring;
and
the detection circuit outputs:
a detection value of force Fx in a direction of the X-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the fourth attribute are given as first opposite sides, and a strain gauge having the second attribute and a strain gauge having the third attribute are given as second opposite sides;
a detection value of force Fy in a direction of the Y-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the second attribute are given as first opposite sides, and a strain gauge having the third attribute and a strain gauge having the fourth attribute are given as second opposite sides;
a detection value of force Fz in a direction of the Z-axis by a Wheatstone bridge circuit in which a serial connection side of a strain gauge having the fifth attribute with a strain gauge having the sixth attribute and a serial connection side of a strain gauge having the seventh attribute with a strain gauge having the eighth attribute are given as first opposite sides, and a serial connection side of a strain gauge having the ninth attribute with a strain gauge having the tenth attribute and a serial connection side of a strain gauge having the eleventh attribute with a strain gauge having the twelfth attribute are given as second opposite sides;
a detection value of moment Mx around the X-axis by a Wheatstone bridge circuit in which a strain gauge having the fifth attribute and a strain gauge having the sixth attribute are given as first opposite sides, and a strain gauge having the seventh attribute and a strain gauge having the eighth attribute are given as second opposite sides;
a detection value of moment My around the Y-axis by a Wheatstone bridge circuit in which a strain gauge having the fifth attribute and a strain gauge having the eighth attribute are given as first opposite sides, and a strain gauge having the sixth attribute and a strain gauge having the seventh attribute are given as second opposite sides;
and
a detection value of moment Mz around the Z-axis by a Wheatstone bridge circuit in which a strain gauge having the first attribute and a strain gauge having the third attribute are given as first opposite sides, and a strain gauge having the second attribute and a strain gauge having the fourth attribute are given as second opposite sides.

36 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/984,364Filed 27 Jul 2011
Published: US 2013/0319135 A15 Dec 2013
Granted: 3 Mar 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

G01L 5/165
For measuring several components of force: using variations in capacitance
G01L 1/14
Measuring force or stress, in general: by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations…
G01L 1/2206
Using resistance strain gauges: special supports with preselected places to mount the resistance strain gauges; Mounting of supports
G01L 3/1442
Using electrical transducers: involving electrostatic means