Electrode of electrostatic lens and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorShuji Yamada
Life of this patent
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Abstract
An electrode to be used for an electrostatic lens, wherein the electrode at least includes: a first substrate having a first through-hole and a second substrate having a second through-hole; the first substrate having a thickness smaller than the second substrate; the first through-hole having a diameter smaller than the second through-hole; the second substrate having a specific resistance smaller than the first substrate, wherein the first substrate and the second substrate are superimposed so that the first through-hole and the second through-hole are aligned relative to each other. Notching taking place near any of the through-holes in a dry etching process can be reduced, and thus, the through-holes can be formed accurately.
Claims4
A method of manufacturing an electrode to be used for an electrostatic lens, the method comprising:
- a step of preparing a first substrate having a first through-hole;
- a step of forming a second through-hole in an original substrate, which is to be processed into a second substrate, from a side of a first surface of the original substrate toward a second surface opposite to the first surface, wherein the second through-hole has a diameter greater than the first through-hole, and the second substrate has a specific resistance smaller than the first substrate;
- and
- a step of superimposing the first substrate and the second substrate by way of aligning the first through-hole and the second through-hole relative to each other and then laying the first substrate on the second surface of the second substrate, after the step of forming the second through-hole.
Dependencies are inferred from the claim text.