Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
AssigneeJapan Super Quartz Corporation
InventorsKazuhiro Harada, Masaki Morikawa, Satoshi Kudo
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AssigneeJapan Super Quartz Corporation
InventorsKazuhiro Harada, Masaki Morikawa, Satoshi Kudo
Estimating the term…
A silica glass crucible for pulling up a silicon single crystal including an outer layer formed from a natural silica glass layer, and an inner layer formed from a synthetic silica glass layer, wherein the synthetic silica glass layer includes a first synthetic silica glass layer formed in a region within a certain range from the center of a crucible bottom section, and a second synthetic silica glass layer formed in a region which excludes the formation region of the first synthetic silica glass layer, and wherein the first synthetic silica glass layer has a thickness of 0.5 mm or more and 1.5 mm or less and a concentration of an OH group included in the first synthetic silica glass layer being 100 ppm or less.
A silica glass crucible used for pulling up a silicon single crystal, comprising:
Dependencies are inferred from the claim text.