Batch substrate handling

A vacuum handling robot for a vacuum processing system, the vacuum handling robot comprising:

• a multifaceted chamber having a base with a center axis and being configured so that each facet of the multifaceted chamber on no more than one side of the center axis is configured to couple to both batch processing modules and single-substrate processing modules;
• a first robotic arm rotatably coupled to the base and a drive section, the first robotic arm including a single-substrate end effector and the drive section being configured to independently operate movement of the first robotic arm to each of the facets of the multifaceted chamber;
• a second robotic arm rotatably coupled to the base and the drive section, the second robotic arm including a batch end effector including a plurality of vertically-stacked end effectors in a fixed orientation relative to one another and the drive section being configured to independently operate movement of the second robotic arm to each of the facets of the multifaceted chamber;
• and
• a controller including a neural network scheduler, the controller including the neural network scheduler being configured to coordinate movement of the first and second robotic arms within the vacuum processing system, where the neural network scheduler
• coordinates movement of the first robotic arm for accessing at least the single-substrate processing modules and
• coordinates movement of the second robotic arm for accessing the batch processing modules, and
• coordinates movement of the first robotic arm and the second robotic arm through a common opening of the multifaceted chamber.