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US 8,950,046 B2Granted
Low-pressure process apparatus
AssigneeAu Optronics Corporation
InventorTing-Hui Huang
Life of this patent
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Abstract
A method for disassembling a low-pressure process apparatus. The method provide a transmission device and a low-pressure process apparatus; and moves the housing to a transmission device in a first horizontal direction via the first roller set.
Claims2
A method for disassembling a low-pressure process apparatus, comprising:
- providing a transmission device and a low-pressure process apparatus, wherein the low pressure process apparatus comprises:
- a base;
- a stage, disposed on the base supporting a substrate;
- a housing, detachably disposed on the base and moving between a first position and a second position, wherein when the housing is in a first position, the housing and the base form a chamber to receive the stage;
- and
- at least one first roller set, wherein when the housing is detached, the first roller set contacts and supports the housing to facilitate movement thereof in a first horizontal direction;
- and
- moving the housing to the transmission device in the first horizontal direction via the first roller set.
5 more elements
Dependencies are inferred from the claim text.