Back to results
US 8,948,419 B2Granted
Microphone with backplate having specially shaped through-holes
AssigneeInvenSense, Inc.
InventorXin Zhang
Life of this patent
Estimating the term…
Abstract
A MEMS microphone has 1) a backplate with a backplate interior surface and a plurality of through-holes, and 2) a diaphragm spaced from the backplate. The diaphragm is movably coupled with the backplate to form a variable capacitor. At least two of the through-holes have an inner dimensional shape (on the backplate interior surface) with a plurality of convex portions and a plurality of concave portions.
Claims4
A MEMS microphone comprising:
- a backplate having a backplate interior surface;
- a diaphragm having a plurality of through-holes, the diaphragm spaced from the backplate and facing the backplate interior surface, the diaphragm being movably coupled with the backplate to form a variable capacitor,
- the backplate having a plurality of through-holes, substantially all of the through-holes each having an inner dimensional shape on the backplate interior surface, each inner dimensional shape having a plurality of convex portions and a plurality of concave portions, each inner dimensional shape also having at least a curved portion, wherein the inner dimensional shape has a hub and a plurality of lobes extending from the hub;
- and
- a plurality of springs suspending the diaphragm above the backplate, the plurality of springs forming a pattern of openings along the periphery of the diaphragm,
- wherein the plurality of diaphragm through-holes have long meandering perimeters, further wherein the inner dimensional shape is generally cross-shaped to generally form a clover shape.
3 more elements
A MEMS microphone comprising:
- a backplate having a backplate interior surface;
- a diaphragm having a plurality of through-holes, the diaphragm spaced from the backplate and facing the backplate interior surface, the diaphragm being movably coupled with the backplate to form a variable capacitor,
- the backplate having a plurality of through-holes, substantially all of the through-holes having an inner dimensional shape on the backplate interior surface, the inner dimensional shape has a hub and a plurality of lobes extending from the hub;
- a plurality of springs suspending the diaphragm above the backplate, the plurality of springs forming a pattern of openings along the periphery of the diaphragm,
- wherein the plurality of diaphragm through-holes have long meandering perimeters, further wherein the inner dimensional shape is generally cross-shaped to generally form a clover shape.
2 more elements
Dependencies are inferred from the claim text.