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US 8,947,919 B2Granted
High capacity low cost multi-stacked cross-line magnetic memory
AssigneeAvalanche Technology, Inc.
InventorsRajiv Yadav Ranjan, Parviz Keshtbod
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Abstract
One embodiment of the present invention includes a diode-addressable current-induced magnetization switching (CIMS) memory element including a magnetic tunnel junction (MTJ) and a diode formed on top of the MTJ for addressing the MTJ.
Claims9
A method of manufacturing a diode-addressable current-induced magnetization switching (CIMS) memory element comprising:
- Forming decoder transistors on a CMOS substrate;
- Depositing a first metal layer on top of the decoder transistors;
- Depositing a magnetic tunnel junction (MTJ) on the first metal layer, etching, depositing a second metal layer on top of the first metal layer and depositing silicon oxide on the etched second metal layer;
- Depositing a third metal layer on top of the silicon oxide to form an erase line;
- Depositing a magnetic shielding layer to form a first stack;
- forming a second stack on top of the first stack.
3 more elements
Dependencies are inferred from the claim text.