Exposure method and apparatus measuring position of movable body based on information on flatness of encoder grating section
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
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Abstract
A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this case, the drive unit can drive the wafer stage in a predetermined direction based on a measurement value after correction in which a measurement error caused by the flatness of the scale included in the measurement value of the encoder is corrected based on the information on the flatness of the scale. Accordingly, the wafer stage can be driven with high accuracy in a predetermined direction using the encoder, without being affected by the unevenness of the scale.
Claims80
An exposure method in which an object is exposed with an energy beam, the method including:
- mounting the object on a movable body that can move in at least a first and a second directions that are orthogonal within a predetermined plane;
- and
- driving the movable body within the predetermined plane, based on measurement information of an encoder system in which one of a grating section and a head unit is arranged on the movable body on which the object is mounted and the other of the grating section and the head unit is arranged facing the movable body and which measures position information of the movable body within the predetermined plane, and based on information on flatness of the grating section, wherein
- the information on flatness of the grating section relates to a measurement error of the encoder system due to a deviation or a displacement of a grating surface of the grating section from a plane that is parallel to the predetermined plane.
An exposure method in which an object is exposed with an energy beam, the method including:
- mounting the object on a movable body that can move in at least a first and a second directions that are orthogonal within a predetermined plane;
- and
- controlling a position of the movable body within the predetermined plane, based on measurement information of an encoder system in which one of a grating section and a head unit is arranged on the movable body on which the object is mounted and the other of the grating section and the head unit is arranged facing the movable body and which measures position information of the movable body within the predetermined plane, and based on correction information to compensate a measurement error of the encoder system that occurs due to flatness of the grating section with respect to a plane that is parallel to the predetermined plane.
An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:
- a movable body that can move in at least a first and a second directions that are orthogonal within a predetermined plane, holding the object;
- an encoder system in which one of a grating section and a head unit is arranged on the movable body on which the object is held and the other of the grating section and the head unit is arranged facing the movable body and which measures position information of the movable body within the predetermined plane;
- and
- a drive unit that drives the movable body within the predetermined plane based on measurement information of the encoder system and information on flatness of the grating section, wherein
- the information on flatness of the grating section relates to a measurement error of the encoder system due to a deviation or a displacement of a grating surface of the grating section from a plane that is parallel to the predetermined plane.
An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:
- a movable body that can move in at least a first and a second directions that are orthogonal within a predetermined plane, holding the object;
- an encoder system in which one of a grating section and a head unit is arranged on the movable body on which the object is held and the other of the grating section and the head unit is arranged facing the movable body and which measures position information of the movable body within the predetermined plane;
- and
- a controller that controls a position of the movable body within the predetermined plane, based on correction information to compensate a measurement error of the encoder system that occurs due to flatness of the grating section with respect to a plane that is parallel to the predetermined plane and based on measurement information of the encoder system.
Dependencies are inferred from the claim text.