Back to results
US 8,947,637 B2Granted
Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsTimotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert
Life of this patent
Estimating the term…
Abstract
A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
Claims36
A lithographic apparatus, comprising:
- a substrate table constructed to hold a substrate;
- a projection system configured to project a patterned radiation beam onto a target portion of the substrate;
- a liquid supply system configured to provide a liquid to a space between the projection system and the substrate;
- and
- a sensor arranged to receive radiation from the projection system, the sensor comprising:
- a radiation detector;
- a radiation-shielding member having an aperture;
- and
- a radiation-transmissive body extending from the radiation-shielding member toward the radiation detector, and arranged such that radiation projected by the projection system comes through the aperture and into the body, the body arranged to couple the radiation to the radiation detector,
- wherein the radiation detector is blocked from liquid on a side of the radiation-shielding member opposite to the radiation detector, and
- wherein there is no substantial gas gap in the path of the radiation between the radiation-shielding member and the radiation detector.
8 more elements
A device manufacturing method, comprising:
- projecting a patterned beam of radiation, through a liquid, using a projection system onto a target portion of a substrate;
- and
- projecting a beam of radiation onto a sensor from the projection system, the sensor comprising a radiation detector, a radiation-shielding member having an aperture, and a radiation-transmissive body extending from the radiation-shielding member toward the radiation detector, the radiation projected by the projection system coming through the aperture and into the body and the body coupling the radiation to the radiation detector, wherein the radiation detector is blocked from fluid on a side of the radiation-shielding member opposite to the radiation detector, and wherein there is no substantial gas gap in the path of the radiation between the radiation-shielding member and the radiation detector.
A lithographic apparatus, comprising:
- a substrate table constructed to hold a substrate;
- a projection system configured to project a patterned radiation beam onto a target portion of the substrate;
- a liquid supply system configured to provide a liquid to a space between the projection system and the substrate;
- and
- a sensor arranged to receive radiation from the projection system, the sensor comprising:
- a radiation detector;
- a radiation-transmissive body extending from a radiation-shielding member toward the radiation detector, and arranged such that radiation projected by the projection system is-incident on a surface of the body comes into the body, the body arranged to couple the radiation to the radiation detector;
- and
- a lens array between the surface and the radiation detector, the lens array arranged to couple the radiation to the radiation detector,
- wherein the radiation detector is blocked from liquid on a side of the body opposite to the radiation detector, and
- wherein there is no substantial gas gap in the path of the radiation between the surface and the lens array.
8 more elements
A device manufacturing method, comprising:
- projecting a patterned beam of radiation, through a liquid, using a projection system onto a target portion of a substrate;
- and
- projecting a beam of radiation, through the liquid, onto a sensor from the projection system, the sensor comprising a radiation detector, a radiation-transmissive body extending from a radiation-shielding member toward the radiation detector, wherein the radiation projected by the projection system is incident on a surface of the body, comes into the body, and passes to the radiation detector, and a lens array between the surface and the radiation detector, the lens array coupling the radiation to the radiation detector, wherein the radiation detector is blocked from liquid on a side of the body opposite to the radiation detector, and wherein there is no substantial gas gap in the path of the radiation between the surface and the lens array.
A sensor unit, comprising:
- a radiation detector;
- a radiation-transmissive body extending from a radiation-shielding member toward the radiation detector, and arranged such that radiation incident on a surface of the body comes into the body, the body arranged to couple the radiation to the radiation detector;
- and
- a lens array between the surface and the radiation detector, the lens array arranged to couple the radiation to the radiation detector,
- wherein the radiation detector is blocked from liquid on a side of the body opposite to the radiation detector, and
- wherein there is no substantial gas gap in the path of the radiation between the surface and the lens array.
3 more elements
Dependencies are inferred from the claim text.