Electromechanical resonator with resonant anchor
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSebastien Hentz, Julien Arcamone
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Abstract
An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.
Claims6
An electromechanical resonator produced on a substrate, comprising:
- a suspended structure produced at least partly from a layer of the substrate, configured to be vibrated to resonate in Lamé mode or in wine-glass mode at at least one natural resonance frequency of the suspended structure;
- an anchor structure to anchor the suspended structure, by at least one area of its periphery, to a remainder of the substrate, wherein the anchor structure is dimensioned to resonate at the resonance frequency, or at a frequency that is a multiple of the resonance frequency;
- means for exciting the suspended structure, to cause it to vibrate at the resonance frequency;
- and
- means for detecting the vibration frequency of the suspended structure, wherein
- the anchor structure includes at least one T-shaped element formed from the layer of the substrate as a first fixed-fixed beam, which resonates at the resonance frequency, or at the frequency that is a multiple of the resonance frequency, and a second beam, a first end of which is coupled with the first beam, and a second end of which is coupled with the suspended structure, and wherein
- the first end of the second beam is coupled with the first beam at a node of vibration of the first beam, and the second end of the second beam is coupled with the suspended structure at a nodal point of the suspended structure.
Dependencies are inferred from the claim text.