Inspecting method and program for object to be inspected

An inspecting method for use with an inspection apparatus for inspecting an object, in which probes of a probe card are brought into electrical contact with a predetermined number of devices of target devices of the object at a time to inspect electrical characteristics of the target devices by moving a mounting table for mounting thereon the object, the method comprising:

• inspecting electrical characteristics of the number of devices of the target devices at a time by bringing the object and the probe card into electrical contact with each other by moving the object together with the mounting table by a distance of the number of devices;
• detecting, upon completion of a first inspection of the target devices, whether inspection errors have occurred in specific devices of the target devices in a regular pattern indicative of a defect pattern associated with a first set of probes of the probe card;
• performing a second inspection when the inspection errors have occurred in the regular pattern;
• wherein the specific devices showing said inspection errors in the first inspection are re-inspected during the second inspection with a second set of probes of the probe card that had previously contacted devices other than the specific devices having said inspection errors in the first inspection;
• and
• wherein performing a second inspection further comprises moving a mounting table in an opposite direction to an inspection direction or an inspection direction by a predetermined number of devices.

An inspecting program stored in a non-transitory computer-readable storage medium and executed for performing an inspection method for an object to be inspected in which probes of a probe card are brought into electrical contact with a predetermined number of devices of target devices of the object at a time to inspect electrical characteristics of the target devices by moving a mounting table for mounting thereon the object under the control of a control unit, comprising:

• performing a second inspection of the target devices upon completion of a first inspection of the target devices, if inspection errors have occurred in specific devices of the target devices in a regular pattern indicative of a defect pattern associated with a first set of probes of the probe card;
• wherein the specific devices showing said inspection errors in the first inspection are re-inspected during the second inspection with a second set of probes of the probe card that had previously contacted devices other than the specific devices having said inspection errors in the first inspection;
• and
• wherein performing a second inspection further comprises moving a mounting table in an opposite direction to an inspection direction or an inspection direction by a predetermined number of devices.

An inspecting program stored in a non-transitory computer-readable storage medium and executed for performing an inspection method for an object to be inspected in which probes of a probe card are brought into electrical contact with a predetermined number of devices of target devices of the object at a time to inspect electrical characteristics of the target devices by moving a mounting table for mounting thereon the object, wherein the program is executed to perform processes of:

• inspecting electrical characteristics of the number of devices of the target devices at a time by bringing the object and the probe card into electrical contact with each other by moving the object together with the mounting table by a distance of the number of devices;
• detecting, upon completion of a first inspection of the target devices, whether inspection errors have occurred in specific devices of the target devices in a regular pattern indicative of a defect pattern associated with a first set of probes of the probe card;
• performing a second inspection when the inspection errors have occurred in the regular pattern;
• wherein the specific devices showing said inspection errors in the first inspection are re-inspected during the second inspection with a second set of probes of the probe card that had previously contacted devices other than the specific devices having said inspection errors in the first inspection;
• and
• wherein performing a second inspection further comprises moving a mounting table in an opposite direction to an inspection direction or an inspection direction by a predetermined number of devices.