Switching apparatus and test apparatus

A test apparatus that tests a device under test, comprising:

• a signal supplying section that supplies a test signal to the device under test;
• a signal acquiring section that acquires a response signal output from the device under test in response to the test signal;
• and
• a judging section that judges pass/fail of the device under test based on the response signal;
• wherein the signal supplying section includes:
• an output terminal connected to the device under test;
• a high-voltage switching apparatus that provides a connection or a disconnection between a first terminal provided with a high reference voltage and a second terminal connected via a high-voltage switching apparatus connection to the output terminal, according to a positive control signal corresponding to a test pattern for testing the device under test, and
• a low-voltage switching apparatus that provides a connection or a disconnection between a first terminal connected via a low-voltage switching apparatus connection to the output terminal and a second terminal provided with a low reference voltage, according to a negative control signal obtained by inverting a logic value of the positive control signal,
• wherein the high-voltage switching apparatus and the low-voltage switching apparatus each include:
• a switch that switches a connection state between the first terminal and the second terminal, according to a control voltage supplied thereto;
• a driving section that supplies the switch with the control voltage corresponding to a control signal supplied thereto,
• a changing section that changes the control voltage supplied from the driving section, according to a designated switching time, and
• a calibration section for detecting the control voltage corresponding to the designated switching time prior to the switching of the switch, the calibration section configured to receive said control signal and to measure at least one of a voltage between the first terminal and the second terminal and an output voltage, wherein for the high-voltage switching apparatus the output voltage is measured at the high-voltage switching apparatus connection, and for the low-voltage switching apparatus the output voltage is measured at the low-voltage switching apparatus connection, the calibration section further configured to perform at least one of changing the control voltage corresponding to the designated switching time and setting an adjustment amount by which a timing at which the control signal is supplied to the driving section is adjusted.

A method of switching a connection state between a first terminal and a second terminal of a switch, comprising:

• switching the connection state according to a control voltage supplied to the switch;
• providing the switch with the control voltage from a driving section, the control voltage corresponding to a control signal supplied to the driving section;
• changing the control voltage output from the driving section via a changing section according to a designated switching time;
• and
• detecting the control voltage corresponding to the designated switching time prior to the switching of the switch via a calibration section, the calibration section configured to receive said control signal and to measure at least one of the voltage between the first terminal and the second terminal and an output voltage applied to a load connected to one of said the first terminal and the second terminal, the calibration section further configured to perform at least one of changing the control voltage corresponding to the designated switching time and setting an adjustment amount by which a timing at which the control signal is supplied to the driving section is adjusted.