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US 8,946,849 B2Granted
BSI image sensor chips with separated color filters and methods for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShuang-Ji Tsai, Dun-Nian Yaung, Jen-Cheng Liu, Jeng-Shyan Lin, Feng-Chi Hung
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Abstract
A device includes a semiconductor substrate having a front side and a backside. A plurality of image sensors is disposed at the front side of the semiconductor substrate. A plurality of clear color-filters is disposed on the backside of the semiconductor substrate. A plurality of metal rings encircles the plurality of clear color-filters.
Claims20
A device comprising:
- a semiconductor substrate having a front side and a backside;
- a plurality of image sensors disposed at the front side of the semiconductor substrate;
- a plurality of clear color-filters and a plurality of colored color-filters on the backside of the semiconductor substrate;
- and
- a plurality of metal rings, each encircling one of the plurality of clear color-filters, wherein each of the plurality of metal rings comprises:
- first edges contacting the respective encircled one of the clear color-filters, wherein the first edges are substantially vertical;
- and
- second edges contacting colored color-filters, wherein the second edges are sloped, with portions of the second edges closer to the clear color-filters being higher than portions of the second edges closer to the colored color-filters.
5 more elements
A device comprising:
- a semiconductor substrate having a front side and a backside;
- a plurality of image sensors disposed at the front side of the semiconductor substrate, wherein the plurality of image sensors forms an array;
- a plurality of clear color-filters on the backside of the semiconductor substrate and over the semiconductor substrate, wherein each of the clear color-filters overlaps one of the plurality of image sensors;
- a plurality of metal rings, each encircling one of the plurality of clear color-filters;
- and
- a plurality of colored color-filters comprising red color-filters, green color-filters, and blue color-filters, wherein each of the colored color-filters overlaps one of the plurality of image sensors, wherein each of the plurality of metal rings comprises:
- first edges contacting the clear color-filters, wherein the first edges are substantially vertical;
- and
- second edges contacting the colored color-filters, wherein the second edges are sloped, with portions of the second edges closer to the clear color-filters being higher than portions of the second edges closer to the colored color-filters.
6 more elements
A device comprising:
- a semiconductor substrate;
- a plurality of image sensors disposed in the semiconductor substrate;
- a plurality of colored color-filters aligned to the plurality of image sensors;
- a plurality of clear color-filters aligned to the plurality of image sensors;
- and a plurality of metal features separating the plurality of colored color-filters and the plurality of clear color-filters from each other, wherein each of the plurality of metal features comprises:
- first edges wherein the first edges are substantially vertical;
- and second edges opposite to respective first edges, wherein the second edges are sloped.
4 more elements
Dependencies are inferred from the claim text.