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US 8,946,848 B2Granted
Apparatus and method for image sensor with carbon nanotube based transparent conductive coating
AssigneeOmniVision Technologies, Inc.
InventorDominic Massetti
Life of this patent
Estimating the term…
Abstract
A backside illuminated image sensor has a carbon nanotube transparent conductive coating formed on the backside of the image sensor. In one implementation the carbon nanotube transparent conductive coating acts as a wavelength selective filter to filter out infrared light. In one implementation the carbon nanotube transparent conductive coating has an optical transparency between 50% and 80% for blue and green color bands.
Claims19
A backside illuminated image sensor, comprising:
- a substrate having a front surface and a back surface;
- an array of light sensitive pixels formed in the front surface of the substrate, each pixel including at least one photodiode;
- a carbon nanotube conductive coating disposed on the back surface of the substrate to apply a bias voltage to respective portions of the back surface of the substrate in electrical contact with each photodiode in the array of pixels;
- the carbon nanotube conductive coating comprising carbon nanotubes embedded in a carrier with carbon nanotubes characteristics determining an optical absorption spectra, the carbon nanotube characteristics and a thickness of the carbon nanotube conductive coating being selected so that the carbon nanotube conductive coating is at least semi-transparent at each wavelength of visible light that the array of light sensitive pixels is designed to detect.
1 more element
A backside illuminated image sensor having a reduced part count, comprising:
- a substrate having a front surface and a back surface;
- an array of light sensitive pixels formed in the front surface of the substrate, each pixel including at least one photodiode;
- a carbon nanotube conductive coating disposed over the back surface of the substrate to facilitate applying a uniform bias voltage to respective portions of the back surface of the substrate in electrical contact with each photodiode in the array of pixels;
- the carbon nanotube conductive coating comprising carbon nanotubes embedded in a carrier with carbon nanotubes characteristics determining an optical absorption spectra, the carbon nanotube characteristics and a thickness of the carbon nanotube conductive coating being selected so that the carbon nanotube conductive coating is at least semi-transparent at each wavelength of visible light that the array of light sensitive pixels is designed to detect;
- the carbon nanotube characteristics being further selected so that the carbon nanotube conductive coating acts as a wavelength selective optical filter for backside illumination of the array of pixels to filter at least one deleterious wavelength of light that degrades performance of the backside illuminated image sensor.
2 more elements
Dependencies are inferred from the claim text.