US 8,946,704 B2 · Semiconductor device

Abstract

A semiconductor device in which release of oxygen from side surfaces of an oxide semiconductor film including c-axis aligned crystal parts can be prevented is provided. The semiconductor device includes a first oxide semiconductor film, a second oxide semiconductor film including c-axis aligned crystal parts, and an oxide film including c-axis aligned crystal parts. In the semiconductor device, the first oxide semiconductor film, the second oxide semiconductor film, and the oxide film are each formed using a IGZO film, where the second oxide semiconductor film has a higher indium content than the first oxide semiconductor film, the first oxide semiconductor film has a higher indium content than the oxide film, the oxide film has a higher gallium content than the first oxide semiconductor film, and the first oxide semiconductor film has a higher gallium content than the second oxide semiconductor film.

Claims16

Dependent claims

A semiconductor device comprising:

a first oxide semiconductor film;
a second oxide semiconductor film over the first oxide semiconductor film, the second oxide semiconductor film comprising a channel region and a low-resistance region;
a gate insulating film over the second oxide semiconductor film;
a gate electrode over the gate insulating film;
a first insulating film in contact with a side surface of the gate electrode;
a first electrode in contact with a side surface of the second oxide semiconductor film;
and
a second electrode in contact with the first electrode, the second oxide semiconductor film, and the first insulating film,
wherein a resistance of the low-resistance region is lower than a resistance of the channel region,
wherein the gate electrode overlaps the channel region, and
wherein the low-resistance region is in contact with the first electrode and the second electrode.

8 more elements

Dependencies are inferred from the claim text.

Semiconductor device

Life of this patent

Semiconductor device

Life of this patent

Abstract

Claims16