Particle beam transport apparatus and method of transporting a particle beam with small beam spot size
AssigneeIon Beam Applications S.A.
InventorsMichel Abs, Szymon Zaremba, Willem Kleeven
Life of this patent
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Abstract
An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dipole magnet and the means for scanning, and means for adjusting the field strength of at least three quadrupole lenses in function of the scanning angle of the charged particle beam. The apparatus can be made at least single achromatic.
Claims14
An apparatus for transporting a charged particle beam to a target, the apparatus comprising:
- a scanning device configured to scan the charged particle beam on said target,
- a dipole magnet arranged upstream of the scanning device,
- at least three quadrupole lenses arranged between the dipole magnet and the scanning device, and
- an adjustment device configured to adjust a field strength of the at least three quadrupole lenses as a function of a scanning angle of the charged particle beam,
- a vacuum chamber configured to provide a path for the charged particle beam, the path extending between the at least three quadrupole lenses and the vacuum chamber, the vacuum chamber being at least partially made of an electrically insulating material, and wherein the at least three quadrupole lenses are outside of the vacuum chamber,
- wherein the adjustment device is configured to obtain at least a single achromatism of the apparatus at multiple predetermined locations on a line or a surface, the line or surface located on the target or a location downstream of the scanning device.
A method of transporting a charged particle beam to a target, the method comprising:
- transporting the charged particle beam through a beam transport apparatus from a beam generator to a scanning device, the charged particle beam bent over a nonzero angle at a location upstream of the scanning device, the transporting comprising moving charged particles in the charged particle beam along a path extending between the at least three quadrupole lenses and a vacuum chamber, the vacuum chamber being at least partially made of an electrically insulating material, and wherein the at least three quadrupole lenses are outside of the vacuum chamber,
- adjusting a magnetic and/or electrical field strength at three or more locations between the upstream location and the scanning device as a function of a scanning angle of the beam, and
- scanning the beam over the target,
- wherein the magnetic and/or electrical field strength is adjusted at the three or more locations to obtain at least a single achromatism of the beam transport apparatus at multiple predetermined locations on a line or a surface, the line or surface located on the target or a location downstream of the scanning device.
Dependencies are inferred from the claim text.