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US 8,946,657 B2Granted
Beam head
AssigneeSiemens Aktiengesellschaft
InventorsManfred Apel, Clemens Fiebiger, Wolfgang Hennig, Roland Schmidt, Björn Österreicher
Life of this patent
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Abstract
The present embodiments relate to a beam head including a vacuum housing, in which an electron source is arranged. The beam head also includes a beam finger that is connected to the vacuum housing and has an outlet window at a distal end. The beam head includes a transformer housing, in which a transformer connected to the electron source is arranged. The transformer housing is arranged directly on the vacuum housing.
Claims13
A beam head comprising:
- a vacuum housing, in which an electron source is arranged;
- a beam finger that is connected to the vacuum housing, the beam finger comprising an outlet window at a distal end;
- and
- a high voltage transformer housing, in which a high voltage transformer connected to the electron source is arranged via a high voltage transformer connection,
- wherein the high voltage transformer housing is arranged directly on a side of the vacuum housing such that the high voltage transformer housing and the vacuum housing share a common dividing wall and form a common beam head housing, and the high-voltage transformer connection to the electron source is entirely inside the common beam head housing.
2 more elements
Dependencies are inferred from the claim text.