Sample positioning apparatus, sample stage, and charged particle beam apparatus

A sample positioning apparatus that positions a sample with respect to a stage, comprising:

• a top table on which the sample is placed;
• an active brake that is disposed under the top table and that generates a reactive force in a direction in which the top table moves with respect to the stage to stop the top table;
• an inner frame that is disposed under the top table and that surrounds the active brake;
• an outer frame that is disposed under the top table and that surrounds the inner frame;
• and
• an actuator that is disposed between the inner frame and the outer frame and that drives the active brake,
• wherein the active brake is fixed to the inner frame and the top table is fixed to the outer frame,
• and wherein the actuator, after driving the active brake to stop the top table with respect to the stage, presses the outer frame to adjust a position of the top table.