Multiple anode ion source
AssigneeSeagate Technology LLC
InventorsPaul Stephen McLeod, Kueir-Weei Chour
Life of this patent
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Abstract
An ion source is provided. The ion source comprises a first cylindrical anode and a second cylindrical anode. The first cylindrical anode is concentric with the second cylindrical anode. The ion source further comprises an electron source positioned within the first cylindrical anode or the second cylindrical anode.
Claims20
An ion source for ion beam deposition comprising:
- a first cylindrical anode having a first overall diameter;
- a second cylindrical anode having a second overall diameter greater than the first overall diameter, the first cylindrical anode being concentric with and axially offset from the second cylindrical anode along a common central axis so as to protrude closer to a substrate than the second cylindrical anode;
- and
- an electron source positioned within the first cylindrical anode or the second cylindrical anode.
A method of depositing multiple concentric zones of a source material on a substrate, wherein respective thicknesses of the concentric zones are different, the method comprising:
- placing an ion source in front of the substrate, the ion source comprising a first cylindrical anode, a second cylindrical anode, and an electron source, the first and second cylindrical anodes concentric about a common central axis with the first cylindrical anode offset with respect to the second cylindrical anode along the common central axis so as to protrude from the second cylindrical anode in a direction toward the substrate with the first anode closer to the substrate than the second anode and having an overall diameter smaller than an overall diameter of the second anode, wherein the electron source is positioned within the first cylindrical anode or the second cylindrical anode;
- applying a first voltage from a first voltage source to the first cylindrical anode to deposit a first thickness of the source material in a first zone on the substrate;
- and
- applying a second voltage to the second cylindrical anode to deposit a different, second thickness of the source material in a second zone on the substrate, wherein the second voltage is from one of the first voltage source or a separate second voltage source.
A method of manufacturing a magnetic recording medium comprising:
- placing an ion source in front of a substrate, the ion source comprising a first cylindrical anode, a second cylindrical anode, and an electron source, the first cylindrical anode being concentric with and axially offset from the second cylindrical anode along a common central axis so as to protrude from the second cylindrical anode toward the substrate, wherein the electron source is positioned within the first cylindrical anode or the second cylindrical anode;
- and
- using the ion source to deposit at least one carbon-containing layer on the substrate by applying a first voltage to the first cylindrical anode to deposit a first thickness of a carbon-containing layer in a first zone on a magnetic layer, and applying a second voltage to the second cylindrical anode to deposit a second thickness of the carbon-containing layer in a second zone on the magnetic layer.
Dependencies are inferred from the claim text.