Automatic filtering of SEM images

A method of automatically evaluating a scanning electron microscope (SEM) image, the method comprising:

• obtaining, using a processor, a source image of a subject;
• obtaining, by the processor, the SEM image taken of the subject;
• and
• evaluating, with the processor, the SEM image based on comparing source contours extracted from the source image and SEM contours extracted from the SEM image to determine whether the SEM image passes or fails, wherein the evaluating is performed incrementally beginning at a lowest resolution of the source image and the SEM image and being performed at increasing resolutions of the source image and the SEM image when the processor does not determine whether the SEM image passes or fails according to a specified certainty.