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US 8,946,627 B2Granted
Three-dimensional mapping using scanning electron microscope images
AssigneeApplied Materials Israel Ltd.
InventorsIshai Schwarzband, Yakov Weinberg
Life of this patent
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AssigneeApplied Materials Israel Ltd.
InventorsIshai Schwarzband, Yakov Weinberg
Estimating the term…
A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.
A method, comprising:
An apparatus, comprising:
An apparatus, comprising:
A computer software product, the product comprising a tangible non-transitory computer-readable medium, in which program instructions are stored, which instructions, when read by a computer, cause the computer to receive multiple detector outputs from respective detectors positioned at respective different positions relative to a sample, which is made-up of multiple types of materials, wherein the detector outputs are indicative of emitted electrons that are emitted from the sample in response to irradiation of the sample by a beam of primary electrons, to compute calibration factors to compensate for variations in emitted electron yield among the types of the materials, to apply the calibration factors to the detector outputs, and to calculate a three-dimensional topographical model of the surface based on the detector outputs to which the calibration factors are applied.
Dependencies are inferred from the claim text.