Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
AssigneeSamsung Display Co., Ltd.
InventorYun-Ho Chang
Life of this patent
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Abstract
An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured by the method, and more particularly, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate, that enables high-definition patterning, and that is capable of controlling a distance between a patterning slit sheet and a substrate that moves, a method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured by the method.
Claims13
A method of manufacturing an organic light-emitting display apparatus by using an organic layer deposition apparatus for forming an organic layer on a substrate, the method comprising:
- fixing the substrate on a transfer unit in a loading unit;
- conveying, into a chamber, the transfer unit on which the substrate is fixed, by using a first conveyer unit installed to pass through the chamber;
- forming an organic layer by depositing a deposition material discharged from an organic layer deposition assembly on the substrate while the substrate is moved relative to the organic layer deposition assembly with the organic layer deposition assembly in the chamber being spaced apart from the substrate by a set distance;
- separating the substrate on which the depositing of the deposition material has been completed from the transfer unit in an unloading unit;
- and
- conveying the transfer unit from which the substrate is separated to the loading unit by using a second conveyer unit installed to pass through the chamber, and
- wherein the forming of the organic layer comprises measuring a distance between the substrate and a patterning slit sheet while the substrate relatively moves with respect to the organic layer deposition assembly.
Dependencies are inferred from the claim text.