Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorSung-Jin Kim
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an organic light-emitting display device includes: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber, the chuck moving member being moved along the guide member by an association of a chain unit and a hook unit, and the substrate being spaced apart from the organic layer deposition assembly.
Claims9
A method of manufacturing an organic light-emitting display device, the method comprising:
- fixing a substrate onto an electrostatic chuck;
- combining the electrostatic chuck with a chuck moving member;
- moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member;
- and
- depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber,
- wherein the chuck moving member is moved along the guide member by an association of a chain, unit and a hook unit, and
- wherein the substrate is spaced apart from the organic layer deposition assembly.
Dependencies are inferred from the claim text.