DNA sequencing and amplification systems using nanoscale field effect sensor arrays

A chemical sensor device for sensing one or more analytes, the chemical sensor device comprising:

• a semiconductor field effect sensor comprising a source, a drain, a gate and a sensing region, wherein the sensing region comprises a nanowire or a nanoplate positioned between the source and drain and the gate is positioned at least partially below the sensing region, the source, and the drain, wherein the sensing region is a temperature controllable sensing region;
• an electrostatic lens electrode positioned over the semiconductor field effect sensor, wherein the electrostatic lens electrode includes a first opening above the sensing region for passing the one or more analytes to be sensed to the sensing region;
• a first passivation layer positioned between the electrostatic lens electrode and the source and the drain of the semiconductor field effect sensor for electrically isolating the electrostatic lens electrode from the source and for electrically isolating the electrostatic lens electrode from the drain;
• and
• an AC voltage controller electrically connected to the gate and both the source and the drain for providing a preselected AC voltage between the gate and the source and between the gate and the drain;
• wherein application of an AC voltage between the gate and the source and between the gate and the drain causes localized dielectric heating of the sensing region, thereby providing for temperature control of the temperature controllable sensing region.