Deposition apparatus, method for manufacturing organic light emitting display apparatus, and organic light emitting display apparatus

#This application claims the benefit of Korean Patent Application No. 10-2013-0056040, filed on May 16, 2013, in the Korean Intellectual Property Office, the disclosure of which application is incorporated herein in its entirety by reference.

#1. Field of Disclosure

#The present disclosure of invention relates to a deposition apparatus, a method of manufacturing an organic light emitting display device (OLEDD), and an organic light emitting display device. The disclosure relates more particularly to a deposition apparatus which is expected to significantly reduce maintenance time thereof, to a method of manufacturing an organic light emitting display device (OLEDD), and to an organic light emitting display device manufactured with use of the deposition apparatus.

#The above and other features and advantages of the present disclosure of invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:

#FIG. 1 is a schematic plan view of a deposition apparatus according to an embodiment of the present disclosure;

#FIG. 2 is a schematic sectional view of a deposition unit of the deposition apparatus of FIG. 1;

#As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.

#The present disclosure of invention will now be described more fully with reference to the accompanying drawings, in which exemplary embodiments are shown. The present teachings may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey its teachings to those skilled in the art. In the drawings, the thicknesses of layers and regions are exaggerated for clarity.

#Hereinafter, the x-axis, the y-axis, and the z-axis are not limited to three axis in the rectangular coordinate system and may be interpreted to a broader term including the definition. For example, the x-axis, the y-axis, and the z-axis may cross one another perpendicularly or may indicate three different directions not crossing one another perpendicularly. For sake of clarity, the positive z-axis will be understood herein to be pointing toward the sky, in other words, opposite to the force direction of gravity.