Method and apparatus for coating
AssigneeBeneq Oy
InventorJarmo Maula
Life of this patent
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Abstract
The invention relates to a method and an apparatus for coating one or more objects (1) by exposing an object (1) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber (2, 40), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object (1) inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object (1) into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object (1) essentially through the at least one distinct precursor region inside the reaction chamber.
Claims10
A method for coating one or more objects, comprising;
- introducing a first precursor to a reaction chamber;
- introducing a second precursor to the reaction chamber;
- and exposing an object to alternately repeating surface reactions of two or more gaseous precursors inside the reaction chamber, wherein the method comprises
- forming at least one distinct precursor region inside the reaction chamber, and
- causing translational, mechanically unsupported and unsuspended, motion of an object inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object into contact with a gaseous precursor, and for moving the object through the at least one distinct precursor region inside the reaction chamber so that the object falls into and out of the distinct precursor region while the object is within the reaction chamber.
Dependencies are inferred from the claim text.