Patterned, dense and high-quality SWNTs arrays
AssigneeThe Regents of the University of California
InventorsPeter J. Burke, Weiwei Zhou, Christopher M. Rutherglen
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Abstract
An electronics component is disclosed herein. The electronics component include a substrate and a plurality of single-walled carbon nanotubes (SWNTs) formed on said substrate, wherein said plurality of SWNTs form a patterned, dense and high-quality arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using FeCl3/polymer as catalytic precursors and chemical vapor deposition (CVD) of methane. With the assistance of polymer, the catalysts may be well-patterned on the wafer surface by simple photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (μCP).
Claims13
A method for forming a uniform array of single-walled carbon nanotubes (SWNTs) comprising the steps of:
- forming a layer of photoresist on a substrate, the photoresist comprising catalyst particles of FeCl3;
- patterning the photoresist into lines on said substrate using photolithography;
- treating said substrate with O2 plasma to remove the lines of photoresist and expose lines of catalytic precursor nanoparticles;
- and
- exposing said substrate to a chemical vapor deposition (CVD) process to grow said array of SWNTs in a wafer's scale.
A method for forming an electronics component comprising an array of single-walled carbon nanotubes (SWNTs), the method comprising the steps of:
- forming a layer of polyvinylpyrrolidine (PVP) on a substrate, the PVP comprising catalyst particles of FeCl3;
- patterning the PVP into lines on said substrate using photolithography;
- treating said substrate with O2 plasma to remove the lines of photoresist and expose lines of catalytic precursor nanoparticles;
- and
- exposing said substrate to a chemical vapor deposition (CVD) process to grow said array of SWNTs in a wafer's scale,
- wherein said array of SWNTs are parallel aligned at a density of at least 3 to 10 SWNTs per micrometer per unit length.
A method for forming a uniform array of single-walled carbon nanotubes (SWNTs) comprising the steps of:
- forming a layer of polyvinylpyrrolidine (PVP) on a substrate, the PVP comprising catalyst particles of FeCl3;
- patterning the PVP into lines on said substrate;
- and
- exposing said substrate to a chemical vapor deposition (CVD) process to grow said array of SWNTs in a wafer's scale;
- wherein the patterning comprises
- dipping an ink onto the surface of a polydimenthylsiloxane (PDMS) stamp;
- applying said stamp to the surface of the substrate to microcontact print (μCP) a pattern comprising a plurality of catalyst columns on the substrate, wherein said plurality of catalyst columns is doped with a plurality of catalytic precursor nanoparticles;
- and
- treating said plurality of catalyst columns to remove excess material and expose said plurality of catalytic precursor nanoparticles.
Dependencies are inferred from the claim text.