Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom
AssigneeLiquidia Technologies, Inc.
InventorsJason P. Rolland, Benjamin Maynor, Robert Lyon Henn
Life of this patent
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Abstract
A laminate nanomold includes a layer of perfluoropolyether defining a cavity that has a predetermined shape and a support layer coupled with the layer of perfluoropolyether. The laminate can also include a tie-layer coupling the layer of perfluoropolyether with the support layer. The tie-layer can also include a photocurable component and a thermal curable component. The cavity can have a broadest dimension of less than 500 nanometers.
Claims20
A method of making a laminate mold comprising:
- positioning a patterned master comprising a pattern of structures adjacent to a support layer;
- positioning the patterned master and adjacent support layer adjacent a nip roller;
- delivering a curable polymer material selected from the group consisting of fluoropolyether, perfluoropolyether, poly(dimethyl siloxane), poly(tetramethyl oxide), poly(ethylene oxide), poly(oxetanes), polyisoprene, polybutadiene, and fluoroolefin-based fluoroelastomers between the patterned master and the support layer adjacent an input side of the nip roller;
- activating the nip roller to form a laminate from the patterned master with the support layer, wherein the curable polymer material is dispersed between the patterned master and the support layer in the laminate;
- treating the laminate to activate a curable component of the curable polymer material such that the curable polymer material is solidified to create a mold layer coupled to the support layer;
- and
- separating the patterned master from the mold layer, wherein the mold layer coupled to the support layer has a modulus at least 200 times the moldulus of the mold layer alone.
A method of making a laminate mold comprising:
- positioning a patterned master comprising a pattern of structures adjacent to a support layer;
- positioning the patterned master and adjacent support layer adjacent a nip roller;
- delivering a curable polymer material selected from the group consisting of fluoropolyether, perfluoropolyether, poly(dimethyl siloxane), poly(tetramethyl oxide), poly(ethylene oxide), poly(oxetanes), polyisoprene, polybutadiene, and fluoroolefin-based fluoroelastomers between the patterned master and the support layer adjacent an input side of the nip roller;
- activating the nip roller to laminate the patterned master with the support layer, wherein the curable polymer material is dispersed between the patterned master and the support layer to form a laminate;
- treating the laminate to activate a curable component of the curable polymer material such that the curable polymer material is solidified to create a mold layer coupled to the support layer, the mold layer having a thickness of less than 75 micrometers;
- and
- separating the patterned master from the mold layer, wherein the mold layer coupled to the support layer has a modulus at least 200 times the modulus of the mold layer alone.
A method of making a laminate mold comprising:
- positioning a patterned master comprising a pattern of structures adjacent to a support layer;
- positioning the patterned master and adjacent support layer adjacent a nip roller;
- delivering a curable polymer material selected from the group consisting of fluoropolyether, perfluoropolyether, poly(dimethyl siloxane), poly(tetramethyl oxide), poly(ethylene oxide), poly(oxetanes), polyisoprene, polybutadiene, and fluoroolefin-based fluoroelastomers between the patterned master and the support layer adjacent an input side of the nip roller;
- activating the nip roller to laminate the patterned master with the support layer, wherein the curable polymer material is dispersed between the patterned master and the support layer to form a laminate;
- treating the laminate to activate a curable component of the curable polymer material such that the curable polymer material is solidified to create a mold layer coupled to the support layer, the mold layer comprising a plurality of cavities, each cavity of the plurality of cavities comprising a predetermined shape and a width to depth ratio of less than about 1,000:1;
- and
- separating the patterned master from the mold layer, wherein the mold layer coupled to the support layer has a modulus at least 200 times the modulus of the mold layer alone.
Dependencies are inferred from the claim text.