Method and device for wet treatment of plate-like articles

A method of wet treating a plate-like article comprising:

• positioning a plate-like article on a spin chuck,
• rotating the plate-like article with the spin chuck, while supplying gas to a first side of the plate-like article through gas supply nozzles positioned in a rotating surface of the spin chuck facing the first side of the plate-like article,
• directing gas discharged from the gas supply nozzles radially outwardly through a gap defined between an upper surface of the spin chuck and a downwardly facing surface of the plate-like article positioned on the spin chuck;
• and
• simultaneously supplying a liquid to only a peripheral region of the first side of the plate-like article through liquid supply nozzles opening on the rotating surface of the spin chuck facing the first side of the plate-like article, and positioned radially outwardly of the gas supply nozzles, the liquid supply nozzles being positioned beneath a peripheral region of a plate-like article positioned on the spin chuck.