System and method for cleaning gas injectors
AssigneeLam Research Corporation
InventorsArmen Avoyan, Cliff La Croix, Hong Shih, Allan Ronne, John Daugherty, Catherine Zhou
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AssigneeLam Research Corporation
InventorsArmen Avoyan, Cliff La Croix, Hong Shih, Allan Ronne, John Daugherty, Catherine Zhou
Estimating the term…
An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
An injector cleaning apparatus comprising a concentric dual flow introducer and a flow-dispersing injector seat, wherein:
An injector cleaning apparatus comprising a concentric dual flow introducer, a flow-dispersing injector seat, an inner flow control module, and an outer flow control module, wherein:
Dependencies are inferred from the claim text.