Method and device for cleaning at least one optical component

A method of cleaning during a cleaning process at least one optical component an irradiation device which comprises at least one radiation source in a vacuum chamber, wherein the method comprises the acts of:

• generating by the at least one of source extreme ultraviolet radiation and soft X-ray radiation having rays;
• guiding the rays via the at least one optical component onto a workpiece to be treated, during which said at least one optical component is at least partly polluted because of at least one inorganic substance introduced by the radiation source forming polluting deposits on the at least one optical component;
• and
• introducing in the vacuum chamber at least one reaction partner that is substantially translucent or transparent to the rays from a dispensing device via a feeder device in dependence on prevailing reaction conditions in the vacuum chamber,
• wherein the reaction partner is configured to react chemically with the polluting deposits so as to remove the polluting deposits from the at least one optical component,
• wherein the introducing act introduces the reaction partner one of in an excess quantity with respect to a pollutant quantity of at least one of the at least one inorganic substance and the polluting deposits and at a rate of up to a chemical equivalent of the pollutant quantity, and
• wherein the at least one reaction partner comprises a halogen.